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Focused ion beam and scanning electron microscopy for 3D materials characterization

Published online by Cambridge University Press:  09 April 2014

Paul G. Kotula ,
Gregory S. Rohrer  and
Michael P. Marsh
Paul G. Kotula
Affiliation:
Sandia National Laboratories; [email protected]
Gregory S. Rohrer
Affiliation:
Carnegie Mellon University; [email protected]
Michael P. Marsh
Affiliation:
Marsh Imaging and Visualization; [email protected]
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Abstract

In this article, we review focused ion beam serial sectioning microscopy paired with analytical techniques, such as electron backscatter diffraction or x-ray energy-dispersive spectrometry, to study materials chemistry and structure in three dimensions. These three-dimensional microanalytical approaches have been greatly extended due to advances in software for both microscope control and data interpretation. Samples imaged with these techniques reveal structural features of materials that can be quantitatively characterized with rich chemical and crystallographic detail. We review these technological advances and the application areas that are benefitting. We also consider the challenges that remain for data collection, data processing, and visualization, which collectively limit the scale of these investigations. Further, we discuss recent innovations in quantitative analyses and numerical modeling that are being applied to microstructures illuminated by these techniques.

Keywords

scanning electron microscopy (SEM)chemical compositioncrystallographic structureion solid interactions
Type
Research Article
Information
MRS Bulletin , Volume 39 , Issue 4: Focused Ion Beam Technology and Applications , April 2014 , pp. 361 - 365
Copyright
Copyright © Materials Research Society 2014 

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