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Engineering and modifying two-dimensional materials by electron beams

Published online by Cambridge University Press:  08 September 2017

Xiaoxu Zhao ,
Jani Kotakoski ,
Jannik C. Meyer ,
Eli Sutter ,
Peter Sutter ,
Arkady V. Krasheninnikov ,
Ute Kaiser  and
Wu Zhou
Xiaoxu Zhao
Affiliation:
Graduate School for Integrative Sciences and Engineering, National University of Singapore, Singapore; [email protected]
Jani Kotakoski
Affiliation:
Faculty of Physics, University of Vienna, Austria; [email protected]
Jannik C. Meyer
Affiliation:
Faculty of Physics, University of Vienna, Austria; [email protected]
Eli Sutter
Affiliation:
Department of Mechanical and Materials Engineering, University of Nebraska–Lincoln, USA; [email protected]
Peter Sutter
Affiliation:
Department of Electrical and Computer Engineering, University of Nebraska–Lincoln, USA; [email protected]
Arkady V. Krasheninnikov
Affiliation:
Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Germany; Department of Applied Physics, Aalto University, Finland; [email protected]
Ute Kaiser
Affiliation:
Central Facility of Electron Microscopy, Ulm University, Germany; [email protected]
Wu Zhou
Affiliation:
Electron Microscopy Laboratory, School of Physical Sciences, University of Chinese Academy of Sciences, China; [email protected]
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Abstract

Electron-beam (e-beam) irradiation damage is often regarded as a severe limitation to atomic-scale study of two-dimensional (2D) materials using electron microscopy techniques. However, energy transferred from the e-beam can also provide a way to modify 2D materials via defect engineering when the interaction of the beam with the sample is precisely controlled. In this article, we discuss the atomic geometry, formation mechanism, and properties of several types of structural defects, ranging from zero-dimensional point defects to extended domains, induced by an e-beam in a few representative 2D materials, including graphene, hexagonal boron nitride, transition-metal dichalcogenides, and phosphorene. We show that atomic as well as line defects and even novel nanostructures can be created and manipulated in 2D materials by an e-beam in a controllable manner. Phase transitions can also be induced. The e-beam in a (scanning) transmission electron microscope not only resolves the intrinsic atomic structure of materials with defects, but also provides new opportunities to modify the structure with subnanometer precision.

Keywords

(scanning) transmission electron microscopytwo-dimensional materialsdefectselectron irradiation
Type
Research Article
Information
MRS Bulletin , Volume 42 , Issue 9: Single Atom Fabrication with Beams and Probes , September 2017 , pp. 667 - 676
Copyright
Copyright © Materials Research Society 2017 

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