Hostname: page-component-78c5997874-t5tsf Total loading time: 0 Render date: 2024-11-09T09:00:57.020Z Has data issue: false hasContentIssue false
  • English
  • Français

Diamond and Amorphous Carbon MEMS

Published online by Cambridge University Press:  31 January 2011

J.P. Sullivan ,
T.A. Friedmann  and
K. Hjort
Get access

Extract

The designer of microelectromechanical systems (MEMS) can increase MEMS performance either by improved mechanical design or by the selection of a MEMS material with improved mechanical performance. In the quest to identify highperformance MEMS materials, diamond and amorphous carbon have recently emerged as a promising class of materials.

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 309 - 311
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1Gardos, M.N., in Tribology Issues and Opportunities in MEMS, edited by Bhushan, B. (Kluwer Academic Publishers, the Netherlands, 1998) p.341.CrossRefGoogle Scholar
2Maboudian, R. and Howe, R.T., J.Vac. Sci. Tech-nol., B 15 (1)(1997) p.1.Google Scholar
3Sullivan, J.P., Friedmann, T.A., Boer, M.P. de, LaVan, D.A., Hohlfelder, R.J., Ashby, C.I.H., Dugger, M.T., Mitchell, M.Dunn, R.G., and Magerkurth, A.J., in Materials Science of Microelectro-mechanical Systems (MEMS) Devices III, edited by Boer, M.P. de, Judy, M.Kahn, H. and Spearing, S.M. (Mater. Res. Soc. Symp. Proc. 657, Warrendale, PA, 2001).Google Scholar
4Björkman, H., Rangsten, P.Hollman, P. and Hjort, K.Sens. Actuators A 73 (1999) p.24.CrossRefGoogle Scholar
5Björkman, H., Rangsten, P. and Hjort, K.Sens. Actuators A 78 (1999) p.41.CrossRefGoogle Scholar
6Kohn, E.Gluche, P. and Adamschik, M.Diamond Relat. Mater. 8 (1999) p.934.CrossRefGoogle Scholar
7Ertl, S.Adamschik, M.Schmid, P.Gluche, P.Flöter, A., and Kohn, E.Diamond Relat. Mater. 9 (2000) p.970.CrossRefGoogle Scholar
8Shibata, T.Kitamoto, Y.Unno, K. and Makino, E.IEEE/ASME J.MEMS 9 (2000) p.47.CrossRefGoogle Scholar
9Ramesham, R.Thin Solid Films 340 (1999) p.1.CrossRefGoogle Scholar
10Auciello, O.Krauss, A.R., Gruen, D.M., Meyer, E.M., Busmann, H.G., Tucek, J.Sumant, A.Jayatissa, A.Moldovan, N.Mancini, D.C., and Gardos, M.N., in Materials Science of Microelectro-mechanical Systems (MEMS) Devices II, edited by Boer, M.P. de, Heuer, A.H., Jacobs, S.J., and Peeters, E. (Mater. Res. Soc. Symp. Proc. 605, Warrendale, PA, 2000) p.73.Google Scholar
11Marks, N.A., McKenzie, D.R., Pailthorpe, B.A., Bernasconi, M. and Parrinello, M.Phys. Rev. Lett. 76 (1996) p. 768; P.A. Schultz, K. Leung and E.B. Stechel, Phys. Rev. B 59 (1999) p.733.CrossRefGoogle Scholar
12Friedmann, T.A., Sullivan, J.P., Knapp, J.A., Tallant, D.R., Follstaedt, D.M., Medlin, D.L., and Mirkarimi, P.B., Appl. Phys. Lett. 71 (1997) p.3820.CrossRefGoogle Scholar
13Sullivan, J.P., Friedmann, T.A., and Baca, A.G., J.Electron. Mater. 26 (1997) p.1021.CrossRefGoogle Scholar
14LaVan, D.A., Hohlfelder, R.J., Sullivan, J.P., Friedmann, T.A., Mitchell, M. and Ashby, C.I.H., in Amorphous and Nanostructured Carbon, edited by Sullivan, J.P., Robertson, J., Zhou, O.Allen, T.B., and Coll, B.F. (Mater. Res. Soc. Symp. Proc. 593, Warrendale, PA, 2000) p.465.Google Scholar
15Weiss, P.Sci. News 158 (2000) p.56.CrossRefGoogle Scholar
16Kang, W.P., Davidsson, J.L., Li, Q.Xu, J.F., Kinser, D.L., and Kerns, D.V., Sens. Actuators A 54 (1996) p.724.CrossRefGoogle Scholar
17Kulisch, W.Malave, A.Lippold, G.Mihalcea, C. and Oesterschulze, E.Diamond Relat. Mater. 6 (1997) p.906.CrossRefGoogle Scholar
18Mao, M.Y., Wang, T.P., Xie, J.F., and Wang, W.Y., in Proc. IEEE Micro Electro Mechanical Systems (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1995) p.392.Google Scholar
19Aslam, M. and Schulz, D. “Technology of Diamond Microelectromechanical Systems,” presented at Transducers '95 and Eurosensors IX, Stockholm, Sweden, June 25–29, 1995.Google Scholar
20Hunn, J.D., Withrow, S.P., White, C.W., Clausing, R.E., and Heatherly, L.Appl. Phys. Lett. 65 (1994) p.3072.CrossRefGoogle Scholar
21Niedermann, Ph.Hänni, W., Blanc, N.Christoph, R. and Burger, J., J.Vac. Sci. Technol., A 14 (1996) p.1233.CrossRefGoogle Scholar
22Trava-Airoldi, V.S., Corat, E.J., Bosco, E. Del, and Leite, N.F., Surf. Coat. Technol. 76–77 (1995) p.797.CrossRefGoogle Scholar
23Jubber, M.G., McLaughlin, A.J., Marsh, J.H., Aitchison, J.S., John, P.Troupe, C.E., and Wilson, J.I.B., Diamond Relat. Mater. 7 (1998) p. 1148.CrossRefGoogle Scholar
24Schueller, O.J.A.Brittain, S.T., and Whitesides, G.M., Sens. Actuators A 72 (1999) p.125.CrossRefGoogle Scholar