Broadband Frequency-Tunable Micromechanical Oscillator Promises to Extend the Applicability of Microelectromechanical Systems (MEMS)

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Type: Research/Researchers
Information: MRS Bulletin , Volume 25 , Issue 12: Materials Science in the Food Industry , December 2000 , pp. 5

DOI: https://doi.org/10.1557/mrs2000.235 [Opens in a new window]

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Broadband Frequency-Tunable Micromechanical Oscillator Promises to Extend the Applicability of Microelectromechanical Systems (MEMS)

Volume 25, Issue 12
Steffen K. Kaldor
DOI: https://doi.org/10.1557/mrs2000.235

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Broadband Frequency-Tunable Micromechanical Oscillator Promises to Extend the Applicability of Microelectromechanical Systems (MEMS)

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