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Basic Aspects and Challenges of Semiconductor Gas Sensors

Published online by Cambridge University Press:  29 November 2013

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Abstract

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Type
Gas-Sensing Materials
Copyright
Copyright © Materials Research Society 1999

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References

1.Seiyama, T., Kato, A., Fujiishi, K., and Nagatani, N., Anal. Chem. 34 (1962) p. 1502.CrossRefGoogle Scholar
2.Taguchi, N., Japanese Patent Application No. 45–38200 (1962).Google Scholar
3.Shaver, P.J., Appl. Phys. Lett. 11 (1967) p. 255.CrossRefGoogle Scholar
4.Seiyama, T. and Yamazoe, N., in Fundamentals and Applications of Chemical Sensors, vol. 309, edited by Schuetzle, D. and Hammerle, R. (American Chemical Society, Washington, DC, 1986) p. 39.CrossRefGoogle Scholar
5.Yamazoe, N. and Miura, N., in Chemical Sensor Technology, vol. 4, edited by Yamauchi, S. (Kodansha-Elsevier, New York, 1992) p. 19.CrossRefGoogle Scholar
6.Kohl, D., Sens. Actuators, 18 (1989) p. 71.CrossRefGoogle Scholar
7.McAleer, J.F., Moseley, P.T., Norris, J.O.W., and Williams, D.E., J. Chem. Soc., Faraday Trans. 83 (1987) p. 1323.CrossRefGoogle Scholar
8.McAleer, J.F., Moseley, P.T., Norris, J.O.W., Williams, D.E., and Tofield, B.C., J. Chem. Soc., Faraday Trans. 84 (1988) p. 441.CrossRefGoogle Scholar
9.Yamazoe, N., Fuchigami, J., Kishikawa, M., and Seiyama, T., Surf. Sci. 86 (1979) p. 335.CrossRefGoogle Scholar
10.Ihokura, K., New Mater. Proc. 1 (1981) p. 43.Google Scholar
11.Egashira, M., Matsumoto, T., Shimizu, Y., and Iwanaga, H., Sens. Actuators, 14 (1988) p. 205.CrossRefGoogle Scholar
12.Kawahara, A., Yoshihara, K., Katsuki, H., Shimizu, Y., and Egashira, M., in Technical Digest of the 7th International Meeting on Chemical Sensors (International Academic Publishers, Beijing, 1998) p. 364.Google Scholar
13.Takao, Y., Miyazaki, K., Shimizu, Y., and Egashira, M., J. Electrochem. Soc. 141 (1994) p. 1028.CrossRefGoogle Scholar
14.Takao, Y., Nakanishi, M., Kawaguchi, T., Shimizu, Y., and Egashira, M., Sens. Actuators, B 24–25 (1995) p. 375.CrossRefGoogle Scholar
15.Xu, C., Tamaki, J., Miura, N., and Yamazoe, N., Denki Kagaku 58 (1990) p. 1143.CrossRefGoogle Scholar
16.Ogawa, H., Nishikawa, M., and Abe, A., J. Appl. Phys. 53 (1982) p. 4448.CrossRefGoogle Scholar
17.Xu, C., Tamaki, J., Miura, N., and Yamazoe, N., Sens. Actuators, B 3 (1991) p. 147.CrossRefGoogle Scholar
18.Ogawa, H., Abe, A., Nishikawa, M., and Hayakawa, S., J. Electrochem. Soc. 128 (1981) p. 685.CrossRefGoogle Scholar
19.Ogawa, H., Abe, A., Nishikawa, M., and Hayakawa, S., J. Electrochem. Soc. 128 (1981) p. 2020.CrossRefGoogle Scholar
20.Xu, C., Tamaki, J., Miura, N., and Yamazoe, N., J. Mater. Sci. Lett. 8 (1989) p. 1092.CrossRefGoogle Scholar
21.Nakahara, T., Takahata, K., and Matsuura, S., in Chemical Sensors, vol. 87–9, edited by Turner, D.R. (The Electrochemical Society, 1987) p. 55.Google Scholar
22.Yamazoe, N., Kurokawa, Y., and Seiyama, T., Sens. Actuators, 4 (1983) p. 283.CrossRefGoogle Scholar
23.Duh, J.G., Jou, J.W., and Chiou, B.S., J. Electrochem. Soc. 136 (1989) p. 2740.CrossRefGoogle Scholar
24.Kuwabara, H., Okuhara, T., and Misono, M., Chem. Lett. 1992 (1992) p. 947.CrossRefGoogle Scholar
25.Takao, Y., Iwanaga, Y., Shimizu, Y., and Egashira, M., Sens. Actuators, B 10 (1993) p. 229.CrossRefGoogle Scholar
26.Takao, Y., Nakanishi, M., Kawaguchi, T., Shimizu, Y., and Egashira, M., Sens. Actuators 24–25 (1995) p. 375.CrossRefGoogle Scholar
27.Egashira, M. and Shimizu, Y., Sens. Actuators 13–14 (1993) p. 443.CrossRefGoogle Scholar
28.Egashira, M., Shimizu, Y., and Takao, Y., in Chemical Sensor Technology, vol. 5, edited by Aizawa, M. (Kodansha-Elsevier, New York, 1992) p. 237.Google Scholar
29.Matsushima, S., Teraoka, Y., Miura, N., and Yamazoe, N., Ipn. J. Appl. Phys. 27 (1988) p. 1798.CrossRefGoogle Scholar
30.Butler, M.A. and Ginley, D.S., J. Electrochem. Soc. 125 (1978) p. 228.CrossRefGoogle Scholar
31.Shimizu, Y., Nakamura, Y., and Egashira, M., Sens. Actuators, B 13–14 (1993) p. 128.CrossRefGoogle Scholar
32.Suzuki, T., Yamazaki, T., Yoshioka, H., and Hikichi, K., J. Mater. Sci. 23 (1988) p. 145.CrossRefGoogle Scholar
33.Klöber, J., Ludwig, M., and Schneider, H.A., Sens. Actuators, B 3 (1991) p. 69.CrossRefGoogle Scholar
34.Takao, Y., Han, M.H., Shimizu, Y., and Egashira, M., Denki Kagaku 64 (1996) p. 1280.CrossRefGoogle Scholar
35.Feng, C.D., Shimizu, Y., and Egashira, M., J. Electrochem. Soc. 141 (1994) p. 220.CrossRefGoogle Scholar
36.Yamazoe, N., Muto, Y., and Seiyama, T., Hyomen Kagaku 5 (1984) p. 241.CrossRefGoogle Scholar
37.Shiratori, M., Sakai, T., and Katsura, M., in Proc. 4th Sensor Symp. (Tsukuba, Japan, 1984) p. 143.Google Scholar
38.Gentry, S.J. and Walsh, P.T., Sens. Actuators, 5 (1984) p. 239.CrossRefGoogle Scholar
39.Gentry, S.J. and Howarth, S.R., Sens. Actuators, 5 (1984) p. 265.CrossRefGoogle Scholar
40.Williams, G. and Coles, G.S.V., Sens. Actuators, 5 (1984) 15–16 (1993) p. 349.Google Scholar
41.Yamazoe, N. and Miura, N., Sens. Actuators, 20 (1994) p. 95.CrossRefGoogle Scholar
42.Sberveglieri, G., Groppelli, G., and Nelli, P., Sens. Actuators, 4 (1991) p. 457.CrossRefGoogle Scholar
43.Faglia, G., Nelli, P., and Sberveglieri, G., Sens. Actuators, 18–19 (1994) p. 497.CrossRefGoogle Scholar
44.Sberveglieri, G., Faglia, G., Groppelli, S., and Nelli, P., Sens. Actuators, 8 (1992) p. 79.CrossRefGoogle Scholar
45.Satake, K., Katayama, A., Ohkoshi, H., Nakahara, T., and Takeuchi, T., Sens. Actuators, 20 (1994) p. 111.CrossRefGoogle Scholar
46.Akiyama, M., Tamaki, J., Miura, N., and Yamazoe, N., Chem. Lett. 1991 (1991) p. 1611.CrossRefGoogle Scholar
47.Tamaki, J., Fujii, T., Fujimori, K., Miura, N., and Yamazoe, N., Sens. Actuators, B 24–25 (1995) p. 396.CrossRefGoogle Scholar
48.Imanaka, N., Banno, S., and Adachi, G., Chem. Lett. 1994 (1994) p. 319.CrossRefGoogle Scholar
49.Imanaka, N., Hirota, Y., and Adachi, G., J. Electrochem. Soc. 142 (1995) p. 1950.CrossRefGoogle Scholar
50.Akiyama, M., Tamaki, J., Miura, N., and Yamazoe, N., Denki Kagaku 64 (1996) p. 1285.CrossRefGoogle Scholar
51.Kudo, S., Ohnishi, H., Matsumoto, T., and Ipponmatsu, M., Sens. Actuators, B 23 (1995) p. 219.CrossRefGoogle Scholar
52.Weimar, U., Vaihinger, S., Schierbaum, K.D., and Göpel, W., in Chemical Sensor Technology, vol. 3, edited by Yamazoe, N. (Kodansha-Elsevier, New York, 1991) p. 51.Google Scholar
53.Gardner, J.W., Shurmer, H.V., and Tan, T.T., Sens. Actuators, B 6 (1992) p. 71.CrossRefGoogle Scholar
54.Singh, S., Hines, E.L., and Gardner, J.W., Sens. Actuators, B 30 (1996) p. 185.CrossRefGoogle Scholar
55.Vernat-Rossi, V., Garcia, C., Talon, R., Denoyer, C., and Berdagué, J., Sens. Actuators, 37 (1996) p. 43.CrossRefGoogle Scholar
56.Kanefusa, S., Nitta, M., and M. Haradome, J. Electrochem. Soc. 132 (1985) p. 1770.CrossRefGoogle Scholar
57.Mizsei, J. and Lantto, V., Sens. Actuators, B 4 (1991) p. 163.CrossRefGoogle Scholar
58.Kanefusa, S., Nitta, M., and Haradome, M., IEEE Trans. Electron Devices 35 (1988) p. 65.CrossRefGoogle Scholar
59.Lantto, V. and Romppainen, P., J. Electrochem. Soc. 135 (1988) p. 2550.CrossRefGoogle Scholar
60.Lantto, V., Romppainen, P., Rantala, T.S., and Leppävuori, S., Sens. Actuators, B 4 (1991) p. 451.CrossRefGoogle Scholar
61.Maekawa, T., Tamaki, J., Miura, N., and Yamazoe, N., Chem. Lett. 1991 (1991) p. 575.CrossRefGoogle Scholar
62.Shimizu, Y., Kai, S., Takao, Y., Hyodo, T., and Egashira, M., in Technical Digest of the 7th International Meeting on Chemical Sensors (International Academic Publishers, Beijing, 1998) p. 470.Google Scholar
63.Ando, M., Suto, S., Suzuki, T., Tauchida, T., Nakayama, C., Miura, N., and Yamazoe, N., Chem. Lett. 1994 (1994) p. 335.CrossRefGoogle Scholar
64.Park, H.S., Shin, H.W., Yun, D.H., Hong, H-K., Kwon, C.H., Lee, K., and Kim, S-T., Sens. Actuators, B 24–25 (1995) p. 478.CrossRefGoogle Scholar
65.Nanto, H., Minami, T., and Takata, S., J. Appl. Phys. 60 (1986) p. 482.CrossRefGoogle Scholar
66.Moseley, P.T. and Williams, D.E., Sens. Actuators, B 1 (1990) p. 113.CrossRefGoogle Scholar
67.Maekawa, T., Tamaki, J., Miura, N., and Yamazoe, N., Chem. Lett. 1992 (1992) p. 639.CrossRefGoogle Scholar
68.Egashira, M., Shimizu, Y., and Takao, Y., Chem. Lett. 1988 (1988) p. 389.CrossRefGoogle Scholar
69.Egashira, M., in Technical Digest of the 9th Sensor Symposium (Tokyo, 1990) p. 107.Google Scholar
70.Takao, Y., Miya, Y., Tachiyama, Y., Shimizu, Y., and Egashira, M., Denki Kagaku 58 (1990) p. 1162.CrossRefGoogle Scholar
71.Nanto, H., Sokooshi, H., and Kawai, T., Sens. Actuators, B 14 (1993) p: 715.CrossRefGoogle Scholar
72.Nishizaka, Y., Yokoyama, C., Inumura, K., Okuhara, T., and Misono, M., Sens. Actuators, 13 (1993) p. 355.CrossRefGoogle Scholar
73.Anno, Y., Maekawa, T., Tamaki, J., Asano, Y., Hayashi, K., Miura, N., and Yamazoe, N., Sens. Actuators, 24–25 (1995) p. 623.CrossRefGoogle Scholar
74.Anno, Y., Maekawa, T., Tamaki, J., Asano, Y., Hayashi, K., Miura, N., and Yamazoe, N., Sens. Mater. 5 (1993) p. 135.Google Scholar
75. To supplement the references in this article with more recent publications, see Egashira, M., in Digest of Technical Papers of Int'l. Conf. Solid-State Sensors and Actuators, Vol. 2, (Chicago, 1997) p. 1385; and M. Egashira and Y. Shimizu, Trans. Inst. Elec. Eng. Japan, 118-E (1998) p. 64.Google Scholar