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Materials Analysis with High Energy Ion Beams Part I: Rutherford Backscattering

Published online by Cambridge University Press:  29 November 2013

H-J. Gossmann  and
L.C. Feldman
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Abstract

This article discusses the underlying principles of Rutherford backscattering spectrometry (RBS). Consideration of the theory of the interaction of high energy ions with solids leads to the conclusion that quantitative elemental analysis of the near-surface composition of solids can be performed by RBS. Examples are given.

Type
Materials Microanalysis
Information
MRS Bulletin , Volume 12 , Issue 6 , September 1987 , pp. 26 - 29
Copyright
Copyright © Materials Research Society 1987

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