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VHF Plasma CVD Synthesis of Photochromic ZnO Nanoparticle

Published online by Cambridge University Press:  01 February 2019

Hiroshi Kajiyama ,
Shin Kuboyama ,
Atsushi Otomo ,
Hiroki Uyama ,
Toshihiro Matsuura ,
Shuhei Inoue ,
Yukihiko Matsumura ,
Keiji Takata ,
Kentaro Tomita  and
Kiichiro Uchino
Hiroshi Kajiyama*
Affiliation:
Tokushima Bunri University, Sanuki, 769-2193, Japan
Shin Kuboyama
Affiliation:
Kyushu University, Kasuga, 816-8580, Japan
Atsushi Otomo
Affiliation:
Hiroshima University, Higashi-hiroshima, 739-8524, Japan
Hiroki Uyama
Affiliation:
Tokushima Bunri University, Sanuki, 769-2193, Japan
Toshihiro Matsuura
Affiliation:
Tokushima Bunri University, Sanuki, 769-2193, Japan
Shuhei Inoue
Affiliation:
Hiroshima University, Higashi-hiroshima, 739-8524, Japan
Yukihiko Matsumura
Affiliation:
Hiroshima University, Higashi-hiroshima, 739-8524, Japan
Keiji Takata
Affiliation:
Kansai University, Suita, 564-8680, Japan
Kentaro Tomita
Affiliation:
Kyushu University, Kasuga, 816-8580, Japan
Kiichiro Uchino
Affiliation:
Kyushu University, Kasuga, 816-8580, Japan
*
*(Email: [email protected])
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Abstract

Photochromic (PC) ZnO nanoparticles are synthesized for the first time by using a VHF plasma enhanced CVD apparatus. The prepared ZnO film changes from transparent to PC state under UV irradiation; on being subjected to heat treatment, it changes back to transparent state. There is a threshold temperature for attaining the PC phase. The Debye-Waller factor of Zn atoms is specifically large for the PC ZnO. The ZnO nanoparticles contain carbon as impurity. The effects of C-O bonds on the ZnO crystal structure and density of states (DOS) are simulated based on density-functional theory. The results reveal that the crystal structure is slightly distorted and a sufficient DOS for PC light absorption is formed in the band gap.

Keywords

plasma-enhanced CVD (PECVD) (chemical reaction)Znoxidenanostructureextended x-ray absorption fine structure (EXAFS)
Type
Articles
Information
MRS Advances , Volume 4 , Issue 27: Processing and Manufacturing , 2019 , pp. 1573 - 1577
Copyright
Copyright © Materials Research Society 2019 

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References

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