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Polarization Resolved Grazing Angle Scatterometry for In Situ Monitoring of Roughness for Silicon and Compound Solar Cells, Light Emitting Devices and other Structured Surfaces

Published online by Cambridge University Press:  27 June 2017

Wojtek J. Walecki ,
Peter S. Walecki ,
Eve S. Walecki  and
Abigail S. Walecki
Wojtek J. Walecki*
Affiliation:
Frontier Semiconductor, 2127Ringwood Ave., San Jose, CA, USA
Peter S. Walecki
Affiliation:
Brown University, 182 Hope St, Providence, RI02912, USA
Eve S. Walecki
Affiliation:
University of Florida, Gainesville, FL32611, USA
Abigail S. Walecki
Affiliation:
Florida Atlantic University, 777 Glades Road Boca Raton, FL33431, USA
*
*(Email: [email protected])
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Abstract

Novel metrology tool for in-situ characterization of surfaces semiconductor solar cells (both silicon and compound), and Light Emitting Device diffusers is presented. The tool measures the total integrated scattering when measuring forward, or back-reflection at very large angles of incidence. The tool is insensitive to vibrations and stray light. We discuss polarization resolved data and characterize our technique using NIST traceable standards. We discuss it’s applications to semiconductor manufacturing.

Keywords

optical propertiestexturephotoreflectance
Type
Articles
Information
MRS Advances , Volume 2 , Issue 53: Energy Storage and Conversion , 2017 , pp. 3129 - 3133
Copyright
Copyright © Materials Research Society 2017 

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References

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