Published online by Cambridge University Press: 13 March 2018
This study provides detailed information on the manufacture of III-V metal organic vapor phase epitaxy precursors through extensive literature and patent research. This data informed a cradle-to-gate life cycle assessment of these chemicals. Reported impacts include cumulative energy demand and greenhouse gas emissions. The results were interpreted to identify sources of environmental burden within the life cycle and were compared to energy demand reported in previous studies.