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Increase of Magnetic Sensitivity of Magnetically Controlled MEMS Switches

Published online by Cambridge University Press:  23 May 2016

Sergey M. Karabanov ,
Dmitry V. Suvorov ,
Gennady P. Gololobov ,
Dmitry Y. Tarabrin  and
Evgeny V. Slivkin
Sergey M. Karabanov*
Affiliation:
Ryazan State Radio Engineering University 59/1 Gagarina St., Ryazan 390005, Russia
Dmitry V. Suvorov
Affiliation:
Ryazan State Radio Engineering University 59/1 Gagarina St., Ryazan 390005, Russia
Gennady P. Gololobov
Affiliation:
Ryazan State Radio Engineering University 59/1 Gagarina St., Ryazan 390005, Russia
Dmitry Y. Tarabrin
Affiliation:
Ryazan State Radio Engineering University 59/1 Gagarina St., Ryazan 390005, Russia
Evgeny V. Slivkin
Affiliation:
Ryazan State Radio Engineering University 59/1 Gagarina St., Ryazan 390005, Russia
*
*(Email: [email protected])
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Abstract

The paper presents the research results of influence of various parameters of magnetic field concentrator geometry on sensitivity of magnetically controlled MEMS switches. It is shown that magnetic sensitivity increases with the growth of the magnetic concentrator width and practically does not depend on its length. It is established that dependence of magnetic sensitivity on the overlap length of the ferromagnetic flexible contact-concentrator has a minimum corresponding to 2-3 lengths of the contact gap. Recommendations on sensitivity increase of magnetically controlled MEMS switches are provided.

Keywords

microelectro-mechanical (MEMS)magneticsensor
Type
Articles
Information
MRS Advances , Volume 1 , Issue 34: Materials Design , 2016 , pp. 2393 - 2399
Copyright
Copyright © Materials Research Society 2016 

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References

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