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High rate deposition of thin film CdTe solar cells by pulsed dc magnetron sputtering

Published online by Cambridge University Press:  19 January 2016

P.M. Kaminski ,
A. Abbas ,
S. Yilmaz ,
J. W. Bowers  and
J.M. Walls
P.M. Kaminski*
Affiliation:
Centre for Renewable Energy Systems Technology, (CREST), School of Electronic, Electrical and Systems Engineering, Loughborough University, Loughborough, Leicestershire, LE11 3TU, UK
A. Abbas
Affiliation:
Centre for Renewable Energy Systems Technology, (CREST), School of Electronic, Electrical and Systems Engineering, Loughborough University, Loughborough, Leicestershire, LE11 3TU, UK
S. Yilmaz
Affiliation:
Centre for Renewable Energy Systems Technology, (CREST), School of Electronic, Electrical and Systems Engineering, Loughborough University, Loughborough, Leicestershire, LE11 3TU, UK
J. W. Bowers
Affiliation:
Centre for Renewable Energy Systems Technology, (CREST), School of Electronic, Electrical and Systems Engineering, Loughborough University, Loughborough, Leicestershire, LE11 3TU, UK
J.M. Walls
Affiliation:
Centre for Renewable Energy Systems Technology, (CREST), School of Electronic, Electrical and Systems Engineering, Loughborough University, Loughborough, Leicestershire, LE11 3TU, UK
*
*Corresponding author: [email protected]
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Abstract

A new high rate deposition method has been used to fabricate thin film CdTe photovoltaic devices using pulsed dc magnetron sputtering. The devices have been deposited in superstrate configuration on to a commercial fluorine doped tin oxide transparent conductor on soda lime glass. The cadmium sulphide and cadmium telluride thin films were deposited from compound targets. The magnetrons were mounted vertically around a cylindrical chamber and the substrate carrier rotates so that the layers can be deposited sequentially. The substrates were held at 200°C during deposition, a process condition previously found to minimize the stress in the coatings. Optimization of the process involved a number of parameters including control of pulse frequency, power and working gas pressure. The devices deposited using the process are exceptionally uniform enabling the CdTe absorber thickness to be reduced to ∼1um. The as-deposited material is dense and columnar. The cadmium chloride treatment increases the grain size and removes planar defects. The microstructure of the films before and after activation has been characterized using a number of techniques including transmission electron microscopy, Energy Dispersive mapping and these measurements have been correlated to device performance. The deposition rate is much higher than can be obtained with radio-frequency sputtering and is comparable with methods currently used in thin film CdTe module manufacturing such as Vapour Transport Deposition and Close Space Sublimation.

Keywords

photovoltaicsputteringtransmission electron microscopy (TEM)
Type
Articles
Information
MRS Advances , Volume 1 , Issue 14: Energy and Sustainability , 2016 , pp. 917 - 922
Copyright
Copyright © Materials Research Society 2016 

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References

REFERENCES

Green, M. A., Emery, K., Hishikawa, Y., Warta, W., and Dunlop, E. D., “Solar cell efficiency tables (Version 46),” Prog. Photovoltaics Res. Appl., vol. 23, pp. 805–812, 2015.CrossRefGoogle Scholar
Sampath, W., Kohli, S., Enzenorth, R. A., Barth, K., Manivannan, V., Hilfiker, J., McCurdy, P. R., Barricklow, K., and Noronha, P., “Advances in continuous, in-line processing of stable CdS/CdTe devices,” in proceedings of IEEE 33rd PVSC, 2008, pp. 1–4.Google Scholar
Compaan, A. D., Gupta, A., Drayton, J., Lee, S.-H., and Wang, S., “14% sputtered thin-film solar cells based on CdTe,” Phys. Status Solidi, vol. 241, no. 3, pp. 779–782, Mar. 2004.Google Scholar
V Plotnikov, V., Carter, C. W., Stayancho, J. M., Paudel, N. R., Mahabaduge, H., Kwon, D., Grice, C. R., and Compaan, A. D., “Semitransparent PV Windows with Sputtered CdS / CdTe Thin Films,” in proceedings of 39th IEEE PVSC, 2013, pp. 0405–0408.Google Scholar
Enríquez, J. P. and Mathew, X., “XRD study of the grain growth in CdTe films annealed at different temperatures,” Sol. Energy Mater. Sol. Cells, vol. 81, pp. 363–369, 2004.Google Scholar
Paudel, N. R., Wieland, K. A., and Compaan, A. D., “Ultrathin CdS/CdTe solar cells by sputtering,” Sol. Energy Mater. Sol. Cells, vol. 105, pp. 109–112, Oct. 2012.Google Scholar
Treharne, R. E., Seymour-Pierce, A., Durose, K., Hutchings, K., Roncallo, S., and Lane, D., “Optical Design and Fabrication of Fully Sputtered CdTe/CdS Solar Cells,” J. Phys. Conf. Ser., vol. 286, p. 012038, Mar. 2011.CrossRefGoogle Scholar
Compaan, A. D., Gupta, A., Lee, S., Wang, S., and Drayton, J., “High efficiency, magnetron sputtered CdS/CdTe solar cells,” Sol. Energy, vol. 77, no. 6, pp. 815–822, Dec. 2004.Google Scholar
Kaminski, P. M., Abbas, A., Chen, C., Yilmaz, S., Bittau, F., Bowers, J. W., and Walls, J. M., “Internal Stress Analysis of CdTe thin films Deposited by Pulsed DC Magnetron Sputtering,” in proceedings of IEEE 42nd PVSC, 2015, submitted.Google Scholar
Pavol, M. J., “Vapor Deposition Apparatus for Continuous Deposition of Multiple Thin Film Layers on a Substrate,” US patent 29093599 B2, 2013.Google Scholar
Garabedian, R., Malik, R., Theil, J., Trivedi, J., and Yu, M., “Vacuum Deposition System For Solar Cell Production And Method Of Manufacturing,” 20150040970 A1, 2015.Google Scholar
Musil, J., “Recent advances in magnetron sputtering technology,” Surf. Coatings Technol., vol. 100–101, pp. 280–286, 1998.CrossRefGoogle Scholar
Kelly, P. J. and Arnell, R. D., “Magnetron sputtering: a review of recent developments and applications,” Vacuum, vol. 56, no. 3, pp. 159–172, Mar. 2000.CrossRefGoogle Scholar
Belkind, A., Zhao, Z., and Carter, D., “Pulsed-DC reactive sputtering of dielectrics: pulsing parameter effects,” in proc. of 43rd Annual Technical Conference - Denver, SVC, 2000, pp. 86–90.Google Scholar
Abbas, A., West, G., Bowers, J., Isherwood, P., Kaminski, P. M., Maniscalo, B., Rowley, P., Walls, J. M., Barricklow, K., Sampath, W., and Barth, K., “The Effect of Cadmium Chloride Treatment on Close-Spaced Sublimated Cadmium Telluride Thin-Film Solar Cells,” IEEE J. Photovoltaics, vol. 3, no. 4, pp. 1361–1366, Oct. 2013.Google Scholar
Yoo, S. H., Butler, K. T., Soon, A., Abbas, A., Walls, J. M., and Walsh, A., “Identification of critical stacking faults in thin-film CdTe solar cells,” Appl. Phys. Lett., vol. 105, p. 062104, 2014.Google Scholar
Abbas, A., West, G. D., Bowers, J. W., Kaminski, P. M., Maniscalco, B., Walls, J. M., Barth, K. L., and Sampath, W. S., “Cadmium chloride assisted re-crystallization of CdTe: The effect of annealing over-treatment,” in proceedings of IEEE 40th PVSC, 2014, pp. 701–706.Google Scholar