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High Aspect Ratio Machining of Nanocarbon Materials by Reactive Ion Etching
Published online by Cambridge University Press: 23 January 2017
Abstract
We demonstrate anisotropic, vertical deep etching of graphite and densely packed carbon nanotube (CNT) thick layer beyond the micrometer scale, which representing the first step toward nanocarbon bulk micromachining. This micromachining process is compatible with standard lithography and therefore allows the fabrication of graphite and CNT architectures with 1 μm lateral resolution and up to 10 μm scale depth.
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- Copyright © Materials Research Society 2017