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Growth of Monolayer WS2 Single Crystals with Atmospheric Pressure CVD: Role of Temperature

Published online by Cambridge University Press:  19 February 2019

Yong Xie ,
Guanfei Wang ,
Zhan Wang ,
Tang Nan ,
Haolin Wang ,
Yabin Wang ,
Yongjie Zhan ,
Wanqi Jie  and
Xiaohua Ma
Yong Xie*
Affiliation:
Key Laboratory of Wide Band-Gap Semiconductor Technology, School of Advanced Materials and Nanotechnology, Xidian University, Xi’an710071, China State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi’an, 710072, China Case Western Reserve University, Cleveland, OH44106, USA
Guanfei Wang
Affiliation:
Key Laboratory of Wide Band-Gap Semiconductor Technology, School of Advanced Materials and Nanotechnology, Xidian University, Xi’an710071, China
Zhan Wang
Affiliation:
Key Laboratory of Wide Band-Gap Semiconductor Technology, School of Advanced Materials and Nanotechnology, Xidian University, Xi’an710071, China
Tang Nan
Affiliation:
Key Laboratory of Wide Band-Gap Semiconductor Technology, School of Advanced Materials and Nanotechnology, Xidian University, Xi’an710071, China
Haolin Wang
Affiliation:
Key Laboratory of Wide Band-Gap Semiconductor Technology, School of Advanced Materials and Nanotechnology, Xidian University, Xi’an710071, China
Yabin Wang
Affiliation:
Chair for Applied Physics, Friedrich-Alexander University Erlangen-Nuremberg, 91058Erlangen, Germany
Yongjie Zhan
Affiliation:
Institute of Photonics and Photon Technology, Northwest University, Xi’an710069, China
Wanqi Jie
Affiliation:
State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi’an, 710072, China
Xiaohua Ma
Affiliation:
Key Laboratory of Wide Band-Gap Semiconductor Technology, School of Advanced Materials and Nanotechnology, Xidian University, Xi’an710071, China
*
*(Email: [email protected])
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Abtract

It has been demonstrated that the introduction of NaCl can significantly improve the quality of monolayer WS2 at the growth temperatures ranging from 700°C to 850°C by atmospheric pressure chemical vapor deposition (APCVD) without the assistant of hydrogen. Here, the influence of NaCl on the nucleation and growth of WS2 has been thoroughly investigated. The morphology and quality of WS2 grown with different temperatures are discussed by optical microscope, Raman and Photoluminescence (PL) spectra. It was found that amount of NaCl can efficiently influence the morphology and quality of WS2 crystals. PL intensity of WS2 crystal increases around three times from the center region to the edge of an individual domain, which may be attributed to the appearance of small triangle hollows formed during the growth at the edge of single crystal WS2.

Keywords

2D materialschemical vapor deposition (CVD) (deposition)optical propertiesscanning electron microscopy (SEM)
Type
Articles
Information
MRS Advances , Volume 4 , Issue 3-4: Nanomaterials , 2019 , pp. 255 - 262
Copyright
Copyright © Materials Research Society 2019 

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