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Fabrication of Novel Nanoporous Films in Moisture-in-Oil Sensors via Chemical Dealloying of Cu-Cr using Combinatorial Search of Cu–Cr Alloy Compositions

Published online by Cambridge University Press:  19 February 2018

Yusuke Yoshii ,
Junpei Sakurai ,
Mizue Mizoshiri  and
Seiichi Hata
Yusuke Yoshii*
Affiliation:
Dept. of Micro-Nano Systems Engineering, Nagoya University Furo-cho, Chikusa-ku, Aiichi464-8603, Japan
Junpei Sakurai
Affiliation:
Dept. of Micro-Nano Systems Engineering, Nagoya University Furo-cho, Chikusa-ku, Aiichi464-8603, Japan
Mizue Mizoshiri
Affiliation:
Dept. of Micro-Nano Systems Engineering, Nagoya University Furo-cho, Chikusa-ku, Aiichi464-8603, Japan
Seiichi Hata
Affiliation:
Dept. of Micro-Nano Systems Engineering, Nagoya University Furo-cho, Chikusa-ku, Aiichi464-8603, Japan
*
†(Email: [email protected])
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Abstract

An as-deposited film with a Cr compositional gradient (22–15 at.% Cr) was immersed in 22.5% HNO3 for 15 hours. In the part of the film with initial Cr content in the range of 22–18 at.%, Cu dealloying resulted in sufficient Cu dealloying (final Cr content = 33–80 at.%) without film dissolution. Using the film with optimal initial composition Cu82Cr18, we successfully fabricated a nanoporous film with a pore size in the range of 20–40 nm. As a result of the formation of Cr2O3 during dealloying, this film was transparent and exhibited an insulation state. The novel nanoporous film is expected to be applied as a nanofilter in moisture-in-oil sensors.

Keywords

nanostructurethin filmcombinatorial synthesis
Type
Articles
Information
MRS Advances , Volume 3 , Issue 4: Nanomaterials , 2018 , pp. 225 - 232
Copyright
Copyright © Materials Research Society 2018 

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Footnotes

*

This article has been updated since original publication. A correction notice detailing the changes is available at doi:10.1557/adv.2018.492.

References

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