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Effect of Compound Dielectric and Metal Thinning on Metal-Insulator-Metal Resonant Absorbers for Multispectral Infrared Air-Bridge Bolometers

Published online by Cambridge University Press:  16 January 2017

Robert E. Peale ,
Seth Calhoun ,
Chris J. Fredricksen ,
Evan Smith ,
Shiva Vangala ,
Kevin Leedy ,
Joshua R. Hendrickson  and
Justin W. Cleary
Robert E. Peale*
Affiliation:
Department of Physics, University of Central Florida, Orlando FL 32816
Seth Calhoun
Affiliation:
Department of Physics, University of Central Florida, Orlando FL 32816
Chris J. Fredricksen
Affiliation:
Department of Physics, University of Central Florida, Orlando FL 32816
Evan Smith
Affiliation:
Air Force Research Laboratory, Sensors Directorate, Wright Patterson AFB, OH 45433 KBRWyle Laboratories, Inc, Dayton, OH 45431
Shiva Vangala
Affiliation:
Air Force Research Laboratory, Sensors Directorate, Wright Patterson AFB, OH 45433 Azimuth Corporation, Dayton, OH 45431
Kevin Leedy
Affiliation:
Air Force Research Laboratory, Sensors Directorate, Wright Patterson AFB, OH 45433
Joshua R. Hendrickson
Affiliation:
Air Force Research Laboratory, Sensors Directorate, Wright Patterson AFB, OH 45433
Justin W. Cleary
Affiliation:
Air Force Research Laboratory, Sensors Directorate, Wright Patterson AFB, OH 45433
*
*(Email: [email protected])
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Abstract

Addition of wavelength selective absorbers on microbolometers tends to increase their thermal mass and slow their infrared response times. Making the bolometric material an integral part of the absorber and minimizing layer thicknesses is one possible way to maintain high detector speeds. Here, we study experimentally the effect on permittivity of adding a layer of semiconducting VOx between two layers of SiO2. Additionally, we investigate theoretically the effect on resonance wavelength of thinning the metal in metal-insulator-metal plasmonic resonant absorbers.

Keywords

infrared (IR) spectroscopydevicessensor
Type
Articles
Information
MRS Advances , Volume 2 , Issue 42: Electronics, Magnetics and Photonics , 2017 , pp. 2281 - 2286
Copyright
Copyright © Materials Research Society 2017 

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References

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