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Determination of the Elastic and Plastic Properties of Transversely Isotropic Thin Films on Substrates by Sharp Indentation

Published online by Cambridge University Press:  16 January 2018

Zheng Zhi  and
T. A. Venkatesh
Zheng Zhi
Affiliation:
Department of Materials Science and Chemical Engineering, Stony Brook University, NY 11794
T. A. Venkatesh*
Affiliation:
Department of Materials Science and Chemical Engineering, Stony Brook University, NY 11794
*
*(Email: [email protected])
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Abstract

A combination of dimensional analysis and finite element modeling was invoked to characterize the indentation behavior of transversely isotropic thin films on substrate materials. Through indentation simulations of over 13,500 combinations of properties for the thin film system, functional relationships that connect the indentation responses of the thin films with the elastic and plastic properties of the thin films were obtained. The forward algorithms that predict the indentation response characteristics from known material properties and the reverse algorithms that predict the material properties from known indentation responses were verified to be very accurate. Thus, the viability of using the indentation method to determine the elastic and plastic properties of transversely isotropic thin films on substrate materials was demonstrated.

Keywords

nano-indentationelastic propertieshardness
Type
Articles
Information
MRS Advances , Volume 3 , Issue 8-9: Theory, Characterization and Modeling , 2018 , pp. 445 - 450
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Copyright
Copyright © Materials Research Society 2018 

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