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SiO2 and TiO2 Sol-Gel Blends with Tunable Optical and Electronic Properties
Published online by Cambridge University Press: 21 February 2019
Abstract
Sol-gel blends are created using a combination of a high refractive index (n∼2.4) TiO2 based sol-gel and a low refractive index (n∼1.5) SiO2 based sol-gel. The blends are prepared with different ratios of sol-gels and films are created using the spin coating method on silicon and ITO-on-glass substrates. The film thickness, refractive index, and dielectric constants of the resulting films are measured using profilometry, prism coupling, and LCR measurements, respectively. Results show that including more SiO2 based sol-gel in the initial mixture creates thicker films ranging from 1-7 μm, but results in lower refractive index and lower dielectric constants. This is consistent with expectations due to SiO2 having a lower refractive index and dielectric constant than titania over a range of wavelengths andfrequencies. The ability to fine tune the properties is explored.
- Type
- Articles
- Information
- MRS Advances , Volume 4 , Issue 11-12: Electronic, Photonic and Magnetic Materials , 2019 , pp. 689 - 695
- Copyright
- Copyright © Materials Research Society 2019
References
REFERENCES
Krogman, K. C., Druffel, T., and Sunkara, M. K., “Anti-reflective optical coatings incorporating nanoparticles,” Nanotechnology, 16 (7), S338 (2005).Google ScholarPubMed
Yoldas, B. E., “Investigations of porous oxides as an antireflective coating for glass surfaces,” Appl. Opt, AO, 19 (9), 1425-1429, (1980).Google ScholarPubMed
Oxide Semiconductor Thin - Film Transistors: A Review of Recent Advances - Fortunato - 2012 - Advanced Materials - Wiley Online Library.”Google Scholar
Nomura, K., Ohta, H., Takagi, A., Kamiya, T., Hirano, M., and Hosono, H., “Room- temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors,” Nature, 432 (7016), 488-492, (2004).Google ScholarPubMed
Chen, D., “Anti-reflection (AR) coatings made by sol-gel processes: A review,” Solar Energy Materials and Solar Cells, 68 (3), 313-336, (2001).CrossRefGoogle Scholar
Kim, Y.-H. et al. , "Flexible metal-oxide devices made by room-temperature photochemical activation of sol-gel films," Nature, 489 (7414), 128-132, (2012).CrossRefGoogle ScholarPubMed
Himmelhuber, R., Norwood, R. A., Enami, Y., and Peyghambarian, N., "Sol-Gel Material-Enabled Electro-Optic Polymer Modulators," Sensors, 15 (8), 18239-18255, (2015).CrossRefGoogle Scholar
Norwood, R. A. et al. , "Hybrid DNA materials for energy storage," in Nanobiosystems: Processing, Characterization, and Applications III, 7765, 77650H, (2010).Google Scholar
Himmelhuber, R., "Sol-gel materials for optical waveguide applications," dissertation, Ph.D., College, Opt. Sci., Univ. Arizona, Tucson, AZ, USA, (2014).Google Scholar
Sriram, S., Partlow, W. D., and Liu, C. S., "Low-loss optical waveguides using plasma- deposited silicon nitride," Appl. Opt., AO, 22 (23), 3664-3665, (1983).CrossRefGoogle ScholarPubMed
Melchiorri, M. et al. , "Propagation losses of silicon nitride waveguides in the near-infrared range," Appl. Phys. Lett., 86 (12), 121111, (2005).Google Scholar
Stutius, W. and Streifer, W., "Silicon nitride films on silicon for optical waveguides," Appl. Opt., AO, 16 (12), 3218-3222, (1977).CrossRefGoogle ScholarPubMed
Soppera, O., Moreira, P. J., Leite, A. P., and Marques, P. V. S., "Low-Loss Photopatternable Hybrid Sol-Gel Materials," J Sol-Gel Sci Technol, 35(1), 27-39, (2005).Google Scholar
Himmelhuber, R., Gangopadhyay, P., Norwood, R. A., Loy, D. A., and , N., Peyghambarian, , "Titanium oxide sol-gel films with tunable refractive index," Opt. Mater. Express, OME, 1 (2), 252-258, (2011).Google Scholar
Bradley, J. D. B. et al. , "Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides for microphotonic devices," Opt. Express, OE, 20(21), 23821-23831, (2012).Google ScholarPubMed
Yang, L.-L., Lai, Y.-S., Chen, J. S., Tsai, P. H., Chen, C. L., and Chang, C. J., "Compositional Tailored Sol-Gel SiO2-TiO2 Thin Films: Crystallization, Chemical Bonding Configuration, and Optical Properties," Journal of Materials Research, 20 (11), 3141-3149, (2005).CrossRefGoogle Scholar
Vishwas, M., Rao, K. N., Gowda, K. V. A., and Chakradhar, R. P. S., "Optical, electrical and dielectric properties of TiO2-SiO2 films prepared by a cost effective sol-gel process," Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy, 83 (1), 614-617, (2011).Google ScholarPubMed
Lis, S., Lukowiak, A., Dylewicz, R., Patela, S., and Maruszewski, K., "SiO2 - TiO2 Thin Film for Integrated Optics Fabricated by the Sol-Gel Technique," in 2006 International Students and Young Scientists Workshop - Photonics and Microsystems, 34-38, (2006).CrossRefGoogle Scholar
Grove, T. T., Masters, M. F., and Miers, R. E., "Determining dielectric constants using a parallel plate capacitor," American Journal of Physics, 73 (1), 52-56 (2004).CrossRefGoogle Scholar
Geyer, R. G., Dielectric characterization and reference materials. Boulder, Colo.: USDeptof Commerce, National Institute of Standards and Technology, (1990).CrossRefGoogle Scholar
Demir, V., Voorakaranam, R., Himmelhuber, R., Herrera, O. D., Norwood, R. A., and Peyghambarian, N., "Microwave Properties of MAPTMS Sol-Gel Films for High-Speed Electrooptic Devices," IEEE Transactions on Microwave Theory and Techniques, 62 (8), 1599-1604, (2014).CrossRefGoogle Scholar
Norwood, R.A. et al. , "Dielectric and electrical properties of sol-gel/DNA blends," in Nanobiosystems: Processing, Characterization, and Applications II, 7403, 74030A, (2009).CrossRefGoogle Scholar