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Preparation and Characterization of Solar Thermal Absorbers by Nanoimprint Lithography and Sputtering

Published online by Cambridge University Press:  24 June 2019

Tina Mitteramskogler ,
Michael J. Haslinger ,
Ambiörn Wennberg ,
Iván Fernandez-Martínez ,
Michael Muehlberger ,
Matthias Krause  and
Elena Guillén
Tina Mitteramskogler*
Affiliation:
PROFACTOR GmbH, Im Stadtgut A2, 4407Steyr-Gleink, Austria
Michael J. Haslinger
Affiliation:
PROFACTOR GmbH, Im Stadtgut A2, 4407Steyr-Gleink, Austria
Ambiörn Wennberg
Affiliation:
Nano4Energy SL, José Gutiérrez Abascal 2, 28006Madrid, Spain
Iván Fernandez-Martínez
Affiliation:
Nano4Energy SL, José Gutiérrez Abascal 2, 28006Madrid, Spain
Michael Muehlberger
Affiliation:
PROFACTOR GmbH, Im Stadtgut A2, 4407Steyr-Gleink, Austria
Matthias Krause
Affiliation:
Helmholtz-Zentrum Dresden-Rossendorf e.V., Bautzner Landstraße 400, 01328Dresden, Germany
Elena Guillén
Affiliation:
PROFACTOR GmbH, Im Stadtgut A2, 4407Steyr-Gleink, Austria
*
*(Email: [email protected])
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Abstract

Selective solar absorbers comprised of plasmonic materials offer great flexibility in design along with a highly promising optical performance. However, the nanopattern generation, typically done with electron beam writing, is a very time-intensive process. In this work, we present a fast, scalable, and flexible method for the fabrication of plasmonic materials by the combination of a deposition mask prepared by nanoimprint lithography and thin film deposition by magnetron sputtering. The fabrication process was first performed on silicon wafer substrates using AFM and SEM measurements to calibrate the deposition time, determine maximal deposition height, and characterize samples. Afterwards, the process was transferred to polished Inconel NiCr-alloy substrates used in high temperature solar absorbers. To investigate the adhesion properties of the nanostructure on the substrate, two different deposition methods were investigated: DC magnetron sputtering and High Power Impulse Magnetron Sputtering (HiPIMS).

Keywords

nanostructureabsorptionsputteringWphysical vapor deposition (PVD)
Type
Articles
Information
MRS Advances , Volume 4 , Issue 35: Energy and Sustainability , 2019 , pp. 1905 - 1911
Copyright
Copyright © Materials Research Society 2019 

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References

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