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Atomic number and crystallographic contrast images with the SEM: a review of backscattered electron techniques

Published online by Cambridge University Press:  05 July 2018

Geoffrey E. Lloyd
Geoffrey E. Lloyd*
Affiliation:
Department of Earth Sciences, The University, Leeds LS2 9JT
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Abstract

Backscattered electrons (BSE) are incident electrons reflected back from a target specimen and imaged with the scanning electron microscope (SEM). Three distinct BSE signals exist: atomic number or Z-contrast, in which composition determines image contrast; orientation contrast, in which specimen crystal structure determines image contrast; and electron channelling patterns (ECP), which are unique for a particular crystal orientation. The origins of these three signals are described, with particular attention being given to the necessary SEM operational and specimen preparation requirements. Z-contrast images are relatively simple to obtain and also have a familiar appearance such that their usage should become commonplace. ECP in comparison require subsequent interpretation which depends on the crystal structure and the relationship between crystal and specimen coordinate systems. A general solution to ECP interpretation is therefore presented, involving the construction of reference ‘ECP-maps’ over the surface of a sphere. A brief summary of the applications and potential use of the three BSE signals in the geological sciences is also given.

Keywords

contrast imagesscanning electron microscopybackscattered electrons.
Type
Electron Microscopy in Mineralogy and Petrology
Information
Mineralogical Magazine , Volume 51 , Issue 359 , March 1987 , pp. 3 - 19
Copyright
Copyright © The Mineralogical Society of Great Britain and Ireland 1987

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