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X-ray diffraction study of thin film elasticity constants
Published online by Cambridge University Press: 24 March 2004
Abstract
We have developed an original method allowing to determine the elasticity constants of thin crystalline films deposited on substrates, which combines X-ray diffraction and in situ tensile testing. This technique has been successfully applied to measure the Poisson's ratio in tungsten thin films (150 nm) and molybdenum sublayers (8 nm) of a Mo/Ni multilayer. This paper gives the principles and experimental requirements for the Young's modulus determination.
- Type
- Research Article
- Information
- Metallurgical Research & Technology , Volume 101 , Issue 2: Science et Génie des MatériauxContraintes résiduelles (suite) , February 2004 , pp. 97 - 102
- Copyright
- © La Revue de Métallurgie, 2004