Hostname: page-component-78c5997874-dh8gc Total loading time: 0 Render date: 2024-10-28T02:13:21.294Z Has data issue: false hasContentIssue false
  • English
  • Français

Optimal PID control of a nano-Newton CMOS-MEMS capacitive forcesensor for biomedical applications

Published online by Cambridge University Press:  22 April 2014

Reza Jalil Mozhdehi  and
Ali Selk Ghafari
Get access

Abstract

This paper presents closed loop simulation of a CMOS-MEMS force sensor for biomedicalapplications employing an optimal proportional-integral-derivative controller. Since thedynamic behavior of the sensor under investigation is nonlinear the iterative feedbacktuning approach was proposed for optimal gains tuning of the proposed controller.Simulation results presented in this research illustrate that the proposed controllersuppresses the undesired in-plane vibration induced by environment or gripper 40 timesfaster than the nonlinear controller proposed in the literature. To suppress the maximuminput disturbance the maximum voltage was approximately 18 V which was less than thepull-in voltage of 30 V. The proposed controller is served to actuate two stator fingersadjacent to a rotor finger in order to provide both the attractive and repellent forcesduring manipulation. Employing the proposed mechanism not only resolves the drawbackscorresponding to the nonlinear controller presented in the literature but also improvesits performance of the closed loop system by using the complete nonlinear dynamics of theforce sensor. Also, applying complete non-linear dynamic of model improves the performanceof controller and is one of superior features of proposed PID controller in comparisonwith the classical controller presented in literature.

Keywords

CMOS-MEMScapacitiveforce sensoriterative feedback tuningPID controller
Type
Research Article
Information
Mechanics & Industry , Volume 15 , Issue 2 , 2014 , pp. 139 - 145
Copyright
© AFM, EDP Sciences 2014

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Gnerlich, M., Perry, S.F., Tatic-Lucic, S., A Submersible Piezoresistive MEMS Lateral Force Sensor for a Diagnostic Biomechanics Platform, Sens. Actuators 188 (2012) 111–119 CrossRefGoogle Scholar
Md Khir, M. Haris, Qu Hongwei, A CMOS-MEMS Nano-Newton Force Sensor for Biomedical Applications, in Proc. 5th IEEE International Conf. Nano/Micro Engineered and Molecular Systems, Xiamen, China, 2010
Estevez, P., Bank, J.M., Porta, M., Wei, J., Sarro, P.M., Tichem, M., Staufer, U., 6 DOF force and torque sensor for micro-manipulation applications, Sens. Actuators 186 (2012) 86–93 CrossRefGoogle Scholar
Itoh, T., Suga, T., Piezoelectric force sensor for scanning force microscopy, Sens. Actuators 43 (1994) 305–310 CrossRefGoogle Scholar
Lin, G., Pister, K.S.J., Roos, K.P., Surface Micromachined Polysilcon Heart Cell Force Transducer, J. Microelectromech. Syst. 9 (2000) 9–17 CrossRefGoogle Scholar
H.K. Chu, J.K. Mills, W.L. Cleghorn, Design of a High Sensitivity Capacitive Force sensor, in Proc. 7th IEEE Nanotechnology International Conference, Hong Kong, 2007, pp. 29–33
H. Xie, G.K. Fedder, A CMOS z-axis capacitive accelerometer with comb-finger sensing, in Proc. 13th Annu. International Conf. MEMS, Miyazaki, Japan, 2000, pp. 496–501
Tsai, M.H., Liu, Y.C., Sun, C.M., Wang, C., Fang, W., A CMOS-MEMS Accelerometer with Tri-axis Sensing Electrodes Arrays, Procedia Engineering 5 (2010) 1083–1086 CrossRefGoogle Scholar
Xie, H., Fedder, G.K., Vertical comb-fingers capacitive actuation and sensing for CMOS-MEMS, Sens. Actuators 95 (2002) 212–221 CrossRefGoogle Scholar
M.H.M. Khir, T. Pornthanomwong, R.N.K. Loh, Hongwei Qu, Nonlinear Controller and Observer Designs of a CMOSMEMS Nano-Newton Force Sensor, International Conference on Intelligent and Advanced Systems (ICIAS), Kuala Lumpur, Malaysia, 2010
T. Hagglund, K.J. Astrom, Method and an apparatus in tuning a PID regulator, US Pat. 4549123, 1985
Li, W., Eskinat, E., Luyben, W.L., An Improved Auto-tune Identification Method, Ind. Eng. Chem. Res. 30 (1991) 1530–1541 CrossRefGoogle Scholar
Marchetti, G., Scali, C., Use of modified relay techniques for the design of model-based controllers for chemical processes, Ind. Engng Chem. Res. 39 (2000) 3325–3334 CrossRefGoogle Scholar
H. Hjalmarsson, S. Gunnarsson, M. Gevers, A convergent iterative restricted complexity control design scheme, In Proceedings of the 33rd IEEE Conference on Decision and control, Orlando, Florida, USA, 1994, pp. 1735–1740
Hjalmarsson, H., Gevers, M., Gunnarsson, S., Lequin, O., Iterative feedback tuning: theory and applications, IEEE Control Systems Mag. 18 (1998) 26–41CrossRefGoogle Scholar