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Fabrication, caractérisation et modélisation de micropoutres multimorphes intégrant un film piézoélectrique d'AlN comme actionneur

Published online by Cambridge University Press:  17 August 2007

Alexandru Andrei ,
Katarzyna Krupa ,
Michal Jozwik ,
Patrick Delobelle ,
Laurent Hirsinger ,
Christophe Gorecki ,
Lukasz Nieradko  and
Cathy Meunier
Alexandru Andrei
Affiliation:
LOPMD, FEMTO-ST, UMR CNRS 6174, Université de Franche-Comté, 16 route de Gray, 25000 Besançon, France
Katarzyna Krupa
Affiliation:
LOPMD, FEMTO-ST, UMR CNRS 6174, Université de Franche-Comté, 16 route de Gray, 25000 Besançon, France
Michal Jozwik
Affiliation:
Institute of Micromechanics and Photonics, Université de Technologie de Varsovie, 8 sw. A. Bokoli, 02.525 Varsovie, Pologne
Patrick Delobelle
Affiliation:
LMARC, FEMTO-ST, UMR CNRS 6174, Université de Franche-Comté, 24 chemin de l'Épitaphe, 25000 Besançon, France
Laurent Hirsinger
Affiliation:
LMARC, FEMTO-ST, UMR CNRS 6174, Université de Franche-Comté, 24 chemin de l'Épitaphe, 25000 Besançon, France
Christophe Gorecki
Affiliation:
LOPMD, FEMTO-ST, UMR CNRS 6174, Université de Franche-Comté, 16 route de Gray, 25000 Besançon, France
Lukasz Nieradko
Affiliation:
LOPMD, FEMTO-ST, UMR CNRS 6174, Université de Franche-Comté, 16 route de Gray, 25000 Besançon, France
Cathy Meunier
Affiliation:
CREST, FEMTO-ST, UMR CNRS 6174, Université de Franche-Comté, 4 place Tharradin, 25200 Montbéliard Cedex, France
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Abstract

Cet article présente les potentialités de films d'AlN piézoélectriques comme éléments actionneurs pour les MEMS. Le cas de micropoutres constituées d'un empilement de différents films (électrode/AlN/électrode/substrat Si) est présenté. Un dispositif interférométrique de type Twyman-Green permet de quantifier précisément les déformées et les déplacements ce qui permet de calculer, à l'aide des équations non simplifiées, différentes grandeurs physiques des films d'AlN, par exemple le module d'Young lié à l'orientation (002) des cristallites, les contraintes résiduelles consécutives au mode d'élaboration, le coefficient de dilatation α ainsi que le coefficient piézoélectrique d31. On retrouve sensiblement les valeurs du matériau massif.

Keywords

Aluminium nitridethin filmresidual stresspiezoelectric coefficientNitrure d'aluminiumfilm mincecontrainte résiduellecoefficient piézoélectrique
Type
Research Article
Information
Mechanics & Industry , Volume 8 , Issue 3: Congrès Mécanique de Grenoble , May 2007 , pp. 267 - 278
Copyright
© AFM, EDP Sciences, 2007

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