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Study of laser induced ablation with focused ion beam/scanning electron microscope devices

Published online by Cambridge University Press:  28 February 2007

MARCO BUSSOLI ,
DIMITRI BATANI ,
TARA DESAI ,
FEDERICO CANOVA ,
MARZIALE MILANI ,
MILAN TRTICA ,
BILJANA GAKOVIC  and
EDOUARD KROUSKY
MARCO BUSSOLI
Affiliation:
Dipartimento di Fisica “G. Occhialini,” Università di Milano Bicocca, Milano, Italy
DIMITRI BATANI
Affiliation:
Dipartimento di Fisica “G. Occhialini,” Università di Milano Bicocca, Milano, Italy
TARA DESAI
Affiliation:
Dipartimento di Fisica “G. Occhialini,” Università di Milano Bicocca, Milano, Italy
FEDERICO CANOVA
Affiliation:
Dipartimento di Fisica “G. Occhialini,” Università di Milano Bicocca, Milano, Italy
MARZIALE MILANI
Affiliation:
Dipartimento di Scienza dei Materiali and “Bombay” FIB/SEM Laboratory, Università di Milano Bicocca, Milano, Italy
MILAN TRTICA
Affiliation:
Vinca Institute of Nuclear Sciences, Belgrade, Serbia
BILJANA GAKOVIC
Affiliation:
Vinca Institute of Nuclear Sciences, Belgrade, Serbia
EDOUARD KROUSKY
Affiliation:
PALS Research Centre, Prague, Czech Republic
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Abstract

We propose the use of Focused Ion Beam/Scanning Electron Microscope (FIB/SEM) devices for the analysis of ablation results. Ablated samples have been obtained by irradiating an Al planar target with an optically smoothed iodine laser working at 0.44 μm. The interpretation of FIB images shows the high potentiality of the technique.

Keywords

Electron emission relaxation regionIon fluxLaser plasma generationLaser powerPlasma heatingPlasma interactionTarget heating
Type
Research Article
Information
Laser and Particle Beams , Volume 25 , Issue 1 , March 2007 , pp. 121 - 125
Copyright
© 2007 Cambridge University Press

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