Hostname: page-component-cd9895bd7-gxg78 Total loading time: 0 Render date: 2024-12-24T18:21:38.806Z Has data issue: false hasContentIssue false
  • English
  • Français

Experimental research on ultrasound-assisted underwater femtosecond laser drilling

Published online by Cambridge University Press:  05 February 2019

Xiaoyan Sun ,
Jianhang Zhou ,
Ji-An Duan ,
Haifeng Du ,
Dongmei Cui  and
Youwang Hu
Xiaoyan Sun
Affiliation:
The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, 932 South Lushan Street, Changsha, 410083, China
Jianhang Zhou
Affiliation:
The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, 932 South Lushan Street, Changsha, 410083, China
Ji-An Duan
Affiliation:
The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, 932 South Lushan Street, Changsha, 410083, China
Haifeng Du
Affiliation:
The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, 932 South Lushan Street, Changsha, 410083, China
Dongmei Cui
Affiliation:
The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, 932 South Lushan Street, Changsha, 410083, China
Youwang Hu*
Affiliation:
The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, 932 South Lushan Street, Changsha, 410083, China
*
Author for correspondence: Youwang Hu, The State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, 932 South Lushan Street, Changsha, 410083, China. E-mail: [email protected]
Get access Rights & Permissions [Opens in a new window]

Abstract

In order to diminish the occurrence of cavitation bubbles during the liquid-assisted laser machining, ultrasound-assisted underwater femtosecond laser drilling on stainless steel is adopted. This method greatly diminishes the optical disturbance of cavitation bubbles. By investigating and analyzing the effect of laser pulse energy and pulse number on the morphology of the holes, it has been found that ultrasound not only has a remarkable function of forming a hole with clean and flat bottom, but also reduces debris redeposition around the processing area. This method improves the machining quality. Besides, it also improves the depth-to-diameter ratio of the hole about 20%.

Keywords

Femtosecond pulsed laserlaser ablationlaser micro-fabrication
Type
Research Article
Information
Laser and Particle Beams , Volume 36 , Issue 4 , December 2018 , pp. 487 - 493
Copyright
Copyright © Cambridge University Press 2019 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Abreu, A, Levy-Bercowski, D, Yu, J, Salgueiro, M, Kalathingal, S and Susin, LF (2005). Physical analyses of optical breakdown and plasma formation in water induced by laser. Acta Photonica Sinica 34, 1610–1614.Google Scholar
Charee, W, Tangwarodomnukun, V and Dumkum, C (2016) Ultrasonic-assisted underwater laser micromachining of silicon. Journal of Materials Processing Technology 231, 209–220.Google Scholar
Chen, X, Xu, RQ, Chen, JP, Shen, ZH, Jian, L and Ni, XW (2004) Shock-wave propagation and cavitation bubble oscillation by ND:YAG laser ablation of a metal in water. Applied Optics 43, 3251–3257.Google Scholar
Chichkov, BN, Momma, C, Nolte, S, Alvensleben, FV and Tünnermann, A (1996) Femtosecond, picosecond and nanosecond laser ablation of solids. Applied Physics A 63, 109–115.Google Scholar
Chien, WT and Hou, SC (2007). Investigating the recast layer formed during the laser trepan drilling of inconel 718 using the Taguchi method. International Journal of Advanced Manufacturing Technology 33, 308–316.Google Scholar
Chu, D, Sun, X, Dong, X, Yin, K, Luo, Z and Chen, G (2017) Effect of double-pulse-laser polarization and time delay on laser-assisted etching of fused silica. Journal of Physics D: Applied Physics 50, 465306.Google Scholar
Deng, G, Su, W, Duan, J, Fan, N, Sun, X and Zhou, J (2016). Research on ablation process of constant elastic alloy with femtosecond laser in solution medium. Applied Physics A 122, 861.Google Scholar
Hu, Y, Yue, H, Duan, J, Wang, C and Zhou, J (2017). Experimental research of laser-induced periodic surface structures in a typical liquid by a femtosecond laser. Chinese Optics Letters 15, 54–58.Google Scholar
Juodkazis, S, Okuno, H, Kujime, N, Matsuo, S and Misawa, H (2004). Hole drilling in stainless steel and silicon by femtosecond pulses at low pressure. Applied Physics A 79, 1555–1559.Google Scholar
Kawata, S, Sun, HB, Tanaka, T and Takada, K (2001). Finer features for functional microdevices. Nature 412, 697–698.Google Scholar
Lauterborn, W and Bolle, H (2006). Experimental investigations of cavitation-bubble collapse in the neighbourhood of a solid boundary. Journal of Fluid Mechanics 72, 391–399.Google Scholar
Liu, H, Chen, F, Wang, X, Yang, Q, Hao, B and Si, J (2012). Influence of liquid environments on femtosecond laser ablation of silicon. Thin Solid Films 518, 5188–5194.Google Scholar
Liu, Z, Wu, B, Samanta, A, Shen, N, Ding, H and Xu, R (2016) Ultrasound-assisted water-confined laser micromachining (UWLM) of metals: experimental study and time-resolved observation. Journal of Materials Processing Technology 245, 259–269.Google Scholar
Liu, Z, Gao, Y, Wu, B, Shen, N and Ding, H (2014). Ultrasound-assisted water-confined laser micromachining: a novel machining process. Manufacturing Letters 2, 87–90.Google Scholar
Matsumura, T, Kazama, A and Yagi, T (2005). Generation of debris in the femtosecond laser machining of a silicon substrate. Applied Physics A 81, 1393–1398.Google Scholar
Nguyen, TTP, Tanabe, R and Ito, Y (2014). Effects of an absorptive coating on the dynamics of underwater laser-induced shock process. Applied Physics A 116, 1109–1117.Google Scholar
Park, JK, Yoon, JW and Cho, SH (2012). Vibration assisted femtosecond laser machining on metal. Optics and Lasers in Engineering 50, 833–837.Google Scholar
Singh, RK (1996). Transient plasma shielding effects during pulsed laser ablation of materials. Journal of Electronic Materials 25, 125–129.Google Scholar
Sun, X, Dong, X, Hu, Y, Li, H and Chu, D (2015) A robust high refractive index sensitivity fiber Mach-Zehnder interferometer fabricated by femtosecond laser machining and chemical etching. Sensors and Actuators A: Physical 230, 111–116.Google Scholar
Tamura, A, Sakka, T, Fukami, K and Ogata, YH (2013). Dynamics of cavitation bubbles generated by multi-pulse laser irradiation of a solid target in water. Applied Physics A: Materials Science and Processing 112, 209–213.Google Scholar
Tomko, J, O'Malley, SM, Trout, C, Naddeo, JJ, Jimenez, R and Griepenburg, JC (2017). Cavitation bubble dynamics and nanoparticle size distributions in laser ablation in liquids. Colloids & Surfaces A: Physicochemical & Engineering Aspects 522, 368–372.Google Scholar
Vorobyev, AY and Guo, C (2007). Femtosecond laser structuring of titanium implants. Applied Surface Science 253, 7272–7280.Google Scholar
Wang, C, Chu, D, Duan, J, Zhou, J, Yin, K and Sun, X (2017). Micro-channel etching characteristics enhancement by femtosecond laser processing high-temperature lattice in fused silica glass. Chinese Optics Letters 15, 56–59.Google Scholar
Wu, B (2014). Ultrasound-assisted water-confined laser micromachining. US Patent.Google Scholar
Yin, K, Duan, J, Wang, C, Dong, X, Song, Y and Luo, Z (2016). Micro torch assisted nanostructures' formation of nickel during femtosecond laser surface interactions. Applied Physics Letters 108, 041914.Google Scholar
Yin, K, Du, H, Dong, X, Wang, C, Duan, JA and He, J (2017) A simple way to achieve bioinspired hybrid wettability surface with micro/nanopatterns for efficient fog collection. Nanoscale 9, 14620–14626.Google Scholar
Zeng, X, Mao, XL, Greif, R and Russo, RE (2005). Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon. Applied Physics A 80, 237–241.Google Scholar
Zeng, K, Hu, Y, Deng, G, Sun, X, Su, W and Lu, Y (2017) Investigation on eigenfrequency of a cylindrical shell resonator under resonator-top trimming methods. Sensors 17, 2011.Google Scholar
Zhang, D, Gökce, B, Sommer, S, Streubel, R and Barcikowski, S (2016) Debris-free rear-side picosecond laser ablation of thin germanium wafers in water with ethanol. Applied Surface Science 367, 222–230.Google Scholar
Zhu, J, Yin, G, Zhao, M, Chen, D and Zhao, L (2005). Evolution of silicon surface microstructures by picosecond and femtosecond laser irradiations. Applied Surface Science 245, 102–108.Google Scholar