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Enhancement of extreme ultraviolet emission from laser irradiated targets by surface nanostructures

Published online by Cambridge University Press:  11 September 2017

E. F. Barte ,
R. Lokasani ,
J. Proska ,
L. Maresova ,
D. Kos ,
O. Maguire ,
G. Joseph ,
J. Sheil ,
F. O'Reilly  and
T. McCormack
...Show all authors
E. F. Barte*
Affiliation:
Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehova 7, 11519 Praha 1, Czech Republic UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
R. Lokasani
Affiliation:
Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehova 7, 11519 Praha 1, Czech Republic UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
J. Proska
Affiliation:
Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehova 7, 11519 Praha 1, Czech Republic
L. Maresova
Affiliation:
Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehova 7, 11519 Praha 1, Czech Republic
D. Kos
Affiliation:
Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehova 7, 11519 Praha 1, Czech Republic UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
O. Maguire
Affiliation:
UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
G. Joseph
Affiliation:
UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
J. Sheil
Affiliation:
UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
F. O'Reilly
Affiliation:
UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
T. McCormack
Affiliation:
UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
E. Sokell
Affiliation:
UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
G. O'Sullivan
Affiliation:
UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
J. Limpouch*
Affiliation:
Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehova 7, 11519 Praha 1, Czech Republic
P. Dunne
Affiliation:
UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
*
Address correspondence and reprint requests to: Ellie Floyd Barte and Prof. Jiří Limpouch, Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, V Holesovickach 2, 180 00 Praha 8, Czech Republic. E-mail: [email protected]
Address correspondence and reprint requests to: Ellie Floyd Barte and Prof. Jiří Limpouch, Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, V Holesovickach 2, 180 00 Praha 8, Czech Republic. E-mail: [email protected]
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Abstract

The effects of shape and thickness of a tin surface layer and of the energy of a 170 ps neodymium:yttrium-aluminum-garnet laser pulse on the conversion efficiency (CE) into extreme ultraviolet emission in the 13.5 nm region is investigated. Whereas a CE of up to 1.16% into the 2% reflection band of multilayer Mo/Si optics was measured for a bulk Sn target at a laser energy of 25 mJ, significant CE enhancement up to 1.49% is demonstrated for a 200-nm-thick Sn layer on a microstructured porous alumina substrate.

Keywords

EUV lithographyEUV sourceMicrostructured Sn targetsLaser-produced plasma
Type
Research Article
Information
Laser and Particle Beams , Volume 35 , Issue 4 , December 2017 , pp. 574 - 578
Copyright
Copyright © Cambridge University Press 2017 

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References

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