Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-23T01:53:01.182Z Has data issue: false hasContentIssue false
  • English
  • Français

The effects of using axial magnetic field in extreme ultraviolet photon sources for nanolithography – recent integrated simulation

Published online by Cambridge University Press:  07 January 2016

V. Sizyuk  and
A. Hassanein
V. Sizyuk*
Affiliation:
Center for Materials under Extreme Environment (CMUXE), School of Nuclear Engineering, Purdue University, West Lafayette, Indiana 47907, USA
A. Hassanein
Affiliation:
Center for Materials under Extreme Environment (CMUXE), School of Nuclear Engineering, Purdue University, West Lafayette, Indiana 47907, USA
*
Address correspondence and reprint requests to: Valeryi Sizyuk, Research Associate Professor, School of Nuclear Engineering, Purdue University, 400 Central Drive, West Lafayette, Indiana 47907, USA. E-mail: [email protected]
Get access Rights & Permissions [Opens in a new window]

Abstract

We developed a comprehensive model for simulating laser/target interaction in the presence of external axial magnetic fields. The model was integrated into the framework of the HEIGHTS-LPP computer simulation package and benchmarked with recent experimental results. The package was then used to study the angular distribution of extreme ultraviolet (EUV) photon output in plasmas produced in tin planar targets by a Nd:YAG laser. A moderate (0.5 T) permanent magnetic field does not affect EUV source evolution and output. More effective control of plasma plume expansion should be based on magnetic field gradients, that is, on the temporary varying magnetic fields as a magnetic pinch. Analysis of angular EUV output showed strong anisotropy of photon emissions. We found that the correct monitoring angle (i.e., at which the measured EUV flux corresponds to the averaged value after the correctly integrated angular distribution) does not depend on laser irradiance in the studied range and is equivalent to ~60°. We recommend arranging the EUV sensors accordingly in experiments with planar tin targets.

Keywords

Extreme ultravioletLaser plasmasMagnetic fieldPlasma device modeling
Type
Research Article
Information
Laser and Particle Beams , Volume 34 , Issue 1 , March 2016 , pp. 163 - 170
Copyright
Copyright © Cambridge University Press 2016 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Batani, D., Vinci, T. & Bleiner, D. (2014). Laser-ablation and induced nanoparticle synthesis. Laser Part. Beams 32, 1–7.Google Scholar
Braginskii, S.I. (1965). Transport processes in a plasma. In Reviews of Plasma Physics, (Leontovich, M.A., Ed.), Vol. 1, p. 205. New York: Consultants Bureau.Google Scholar
Ducruet, C., Kornilov, N., Fernández de Julián, C. & Givord, D. (2006). Laser generated plasmas characterized under magnetic field. Appl. Phys. Lett. 88, 044102.Google Scholar
Elg, D.T., Sporre, J.R., Curreli, D., Shchelkanov, I.A., Ruzic, D.N. & Umstadterb, K.R. (2015). Magnetic debris mitigation system for extreme ultraviolet sources. J. Micro/Nanolith. MEMS MOEMS 14, 013506.Google Scholar
Fazeli, R., Mahdieh, M.H. & Tallents, G.J. (2011). Enhancement of line X-ray emission from iron plasma created by laser irradiation of porous targets. Laser Part. Beams 29, 193–200.Google Scholar
Hansen, S.B., Colgan, J., Faenov, A.Ya., Abdallah, J. Jr., Pikuz, S.A. Jr., Skobelev, I.Yu., Wagenaars, E., Booth, N., Culfa, O. & Dance, R.J. (2014). Detailed analysis of hollow ions spectra from dense matter pumped by X-ray emission of relativistic laser plasma. Phys. Plasmas 21, 031213.CrossRefGoogle Scholar
Hassanein, A., Sizyuk, V. & Sizyuk, T. (2008). Multidimensional simulation and optimization of hybrid laser and discharge plasma devices for EUV lithography. Proc. SPIE 6921, 692113.Google Scholar
Herman, F. & Skillman, S. (1963). Atomic Structure Calculations. Englewood Cliffs: Prentice Hall.Google Scholar
Kim, K.K., Roy, M., Kwon, H., Song, J.K. & Park, S.M. (2015). Laser ablation dynamics in liquid phase: The effects of magnetic field and electrolyte. J. Appl. Phys. 117, 074302.Google Scholar
Knoepfel, H.E. (2000). Magnetic Fields: A Comprehensive Theoretical Treatise for Practical Use. New York: John Wiley & Sons.CrossRefGoogle Scholar
Kondo, K., Kanesue, T., Tamura, J., Dabrowski, R. & Okamura, M. (2010). Laser plasma in a magnetic field. Rev. Sci. Instrum. 81, 02B716.Google Scholar
Kumar, M., Singh, R. & Verma, U. (2014). Bremsstrahlung soft X-ray emission from clusters heated by a Gaussian laser beam. Laser Part. Beams 32, 9–14.CrossRefGoogle Scholar
Miloshevsky, G.V., Sizyuk, V., Partenskii, M.B., Hassanein, A. & Jordan, P.C. (2006). Application of finite-difference methods to membrane-mediated protein interactions and to heat and magnetic field diffusion in plasmas. J. Comp. Phys. 212, 25.Google Scholar
Montgomery, D.S., Albright, B.J., Barnak, D.H., Chang, P.Y., Davies, J.R., Fiksel, G., Froula, D.H., Kline, J.L., MacDonald, M.J., Sefkow, A.B., Yin, L. & Betti, R. (2015). Use of external magnetic fields in hohlraum plasmas to improve laser-coupling. Phys. Plasmas 22, 010703.Google Scholar
Morozov, V., Tolkach, V. & Hassanein, A. (2004). Calculation of Tin Atomic Data and Plasma Properties. Report No ANL-ET-04/24. Argonne, IL: Argonne National Laboratory.Google Scholar
Morris, O., Hayden, P., O'Reilly, F., Murphy, N., Dunne, P. & Bakshi, V. (2007). Angle-resolved absolute out-of-band radiation studies of a tin-based laser-produced plasma source. Appl. Phys. Lett. 91, 081506.Google Scholar
Okamura, M., Sekine, M., Ikeda, S., Kanesue, T., Kumaki, M. & Fuwa, Y. (2015). Preliminary result of rapid solenoid for controlling heavy-ion beam parameters of laser ion source. Laser Part. Beams 33, 137–141.Google Scholar
Raju, M.S., Singh, R.K., Gopinath, P. & Kumar, A. (2014). Influence of magnetic field on laser-produced barium plasmas: Spectral and dynamic behaviour of neutral and ionic species. J. Appl. Phys. 116, 153301.Google Scholar
Rouleau, C.M., Puretzky, A.A. & Geohegan, D.B. (2014). Slowing of femtosecond laser-generated nanoparticles in a background gas. J. Appl. Phys. Lett. 105, 213108.Google Scholar
Roy, A., Harilal, S.S., Hassan, S.M., Endo, A., Mocek, T. & Hassanein, A. (2015). Collimation of laser-produced plasmas using axial magnetic field. Laser Part. Beams 33, 175–182.Google Scholar
Roy, A., Hassan, S.M., Harilal, S.S., Endo, A., Mocek, T. & Hassanein, A. (2014). Extreme ultraviolet emission and confinement of tin plasmas in the presence of a magnetic field. Phys. Plasmas 21, 053106.Google Scholar
Sizyuk, T. & Hassanein, A. (2013). The role of plasma evolution and photon transport in optimizing future advanced lithography sources. J. Appl. Phys. 114, 083109.Google Scholar
Sizyuk, T. & Hassanein, A. (2014 a). Scaling mechanisms of vapor/plasma shielding from laser produced plasmas to magnetic fusion regimes. Nucl. Fusion 54, 023004.CrossRefGoogle Scholar
Sizyuk, T. & Hassanein, A. (2014 b). Optimizing laser produced plasmas for efficient extreme ultraviolet and soft X-ray light sources. Phys. Plasmas 21, 083106.Google Scholar
Sizyuk, V., Hassanein, A., Morozov, V., Tolkach, V., Sizyuk, T. & Rice, B. (2006 a). Numerical simulation of laser-produced plasma devices for EUV lithography using the heights integrated model. Num. Heat Tr. A 49, 215.CrossRefGoogle Scholar
Sizyuk, V., Hassanein, A. & Sizyuk, T. (2006 b). Three-dimensional simulation of laser-produced plasma for extreme ultraviolet lithography applications. J. Appl. Phys. 100, 103106.Google Scholar
Sizyuk, V. & Hassanein, A. (2007). Hollow laser self-confined plasma for extreme ultraviolet lithography and other applications. Laser Part. Beams 25, 143.Google Scholar
Sizyuk, V. & Hassanein, A. (2010). Damage to nearby divertor components of ITER-like devices during giant ELMs and disruptions. Nucl. Fusion 50, 115004.Google Scholar
Sizyuk, V. & Hassanein, A. (2013 a). Integrated self-consistent analysis of NSTX performance during normal operation and disruptions. J. Nucl. Mater. 438, S809.Google Scholar
Sizyuk, V. & Hassanein, A. (2013 b). Kinetic Monte Carlo simulation of escaping core plasma particles to SOL for accurate response of plasma-facing components. Nucl. Fusion 53, 073023.Google Scholar
Sizyuk, V. & Hassanein, A. (2015). Heat loads to divertor nearby components from secondary radiation evolved during plasma instabilities. Phys. Plasmas 22, 013301.Google Scholar
Toth, G. & Odstrcil, D. (1996). Comparison of some flux corrected transport and total variation diminishing numerical schemes for hydrodynamic and magnetohydrodynamic problems. J. Comput. Phys. 128, 82.CrossRefGoogle Scholar
Zaltzmann, D. (1998). Atomic Physics in Hot Plasmas. Chap. 4, New York: Oxford University Press.Google Scholar