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Development of a new high-current triode extraction system for helicon ion source: design and simulation

Published online by Cambridge University Press:  15 January 2019

M. Khoshhal ,
M. Habibi  and
Rod W. Boswell
M. Khoshhal
Affiliation:
Department of Energy Engineering and Physics, Amirkabir University of Technology (Tehran Polytechnic), Tehran, Iran
M. Habibi*
Affiliation:
Department of Energy Engineering and Physics, Amirkabir University of Technology (Tehran Polytechnic), Tehran, Iran
Rod W. Boswell
Affiliation:
Space Plasma, Power and Propulsion Laboratory, Research School of Physics and Engineering, The Australian National University, Canberra, Australian Capital Territory 2601, Australia
*
Author for correspondence: M. Habibi, Department of Energy Engineering and Physics, Amirkabir University of Technology (Tehran Polytechnic), Tehran, Iran, E-mail: [email protected]
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Abstract

Three triode extraction systems are simulated by IBSimu ion optical code for Amirkabir Helicon Ion Source (AHIS). The optimized pierce and suggested parabolic electrodes are introduced for the first time in this paper. The obtained N+ beam for parabolic geometry designed for ion implantation has 66 keV energy, and 10.4 mA current. Ion beam emittance and Twiss parameters of the emittance ellipse as the function of x term index are calculated for parabolic electrode equation. The simulated triode extraction systems have been evaluated by using of optimized parameters such as the extraction voltage, gap distance, plasma electrode (PE) aperture, and ion temperature. The extraction voltage, gap distance, PE aperture, and ion temperature have been changed in the range of 58–70 kV, 35–39 mm, 4–6 mm, and 0.5–4.4 eV in the simulations, respectively.

Keywords

Extraction ion beamhelicon ion sourceIBSimu code
Type
Research Article
Information
Laser and Particle Beams , Volume 36 , Issue 4 , December 2018 , pp. 477 - 486
Copyright
Copyright © Cambridge University Press 2019 

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