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Application of laser driven fast high density plasma blocks for ion implantation

Published online by Cambridge University Press:  05 December 2005

AMIR H. SARI ,
F. OSMAN ,
K.R. DOOLAN ,
M. GHORANNEVISS ,
H. HORA ,
R. HÖPFL ,
G. BENSTETTER  and
M.H. HANTEHZADEH
AMIR H. SARI
Affiliation:
Plasma Physics Research Center, Islamic Azad University, Tehran, Iran
F. OSMAN
Affiliation:
SQMMS, University of Western Sydney, Penrith, Australia
K.R. DOOLAN
Affiliation:
SQMMS, University of Western Sydney, Penrith, Australia
M. GHORANNEVISS
Affiliation:
Plasma Physics Research Center, Islamic Azad University, Tehran, Iran
H. HORA
Affiliation:
Department of Theoretical Physics, University of New South Wales, Sydney, Australia
R. HÖPFL
Affiliation:
University of Applied Sciences, Deggendorf, Germany
G. BENSTETTER
Affiliation:
University of Applied Sciences, Deggendorf, Germany
M.H. HANTEHZADEH
Affiliation:
Plasma Physics Research Center, Islamic Azad University, Tehran, Iran
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Abstract

The measurement of very narrow high density plasma blocks of high ion energy from targets irradiated with ps-TW laser pulses based on a new skin depth interaction process is an ideal tool for application of ion implantation in materials, especially of silicon, GaAs, or conducting polymers, for micro-electronics as well as for low cost solar cells. A further application is for ion sources in accelerators with most specifications of many orders of magnitudes advances against classical ion sources. We report on near band gap generation of defects by implantation of ions as measured by optical absorption spectra. A further connection is given for studying the particle beam transforming of n-type semiconductors into p-type and vice versa as known from sub-threshold particle beams. The advantage consists in the use of avoiding aggressive or rare chemical materials when using the beam techniques for industrial applications.

Keywords

Application to nanotechnologyBlock acceleration of particles by lasersIntense electron beamsIntense ion beamsLaser ion sourceSkin layer acceleration
Type
Workshop on Fast High Density Plasma Blocks Driven By Picosecond Terawatt Lasers
Information
Laser and Particle Beams , Volume 23 , Issue 4 , October 2005 , pp. 467 - 473
Copyright
© 2005 Cambridge University Press

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References

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