Hostname: page-component-cd9895bd7-gbm5v Total loading time: 0 Render date: 2024-12-23T11:46:32.092Z Has data issue: false hasContentIssue false
  • English
  • Français

A study of the parameters of particles ejected from a laser plasma

Published online by Cambridge University Press:  01 October 2004

D. DORIA ,
A. LORUSSO ,
F. BELLONI ,
V. NASSISI ,
L. TORRISI  and
S. GAMMINO
D. DORIA
Affiliation:
Department of Physics of Lecce, Laboratorio di Elettronica Applicata e Strumentazione, Lecce, Italy INFN sez. di Lecce, Lecce, Italy
A. LORUSSO
Affiliation:
Department of Physics of Lecce, Laboratorio di Elettronica Applicata e Strumentazione, Lecce, Italy INFN sez. di Lecce, Lecce, Italy
F. BELLONI
Affiliation:
Department of Physics of Lecce, Laboratorio di Elettronica Applicata e Strumentazione, Lecce, Italy INFN sez. di Lecce, Lecce, Italy
V. NASSISI
Affiliation:
Department of Physics of Lecce, Laboratorio di Elettronica Applicata e Strumentazione, Lecce, Italy INFN sez. di Lecce, Lecce, Italy
L. TORRISI
Affiliation:
Department of Physics of Messina, Lecce, Italy INFN, Laboratori Nazionali del Sud, Catania, Italy
S. GAMMINO
Affiliation:
INFN, Laboratori Nazionali del Sud, Catania, Italy
Get access Rights & Permissions [Opens in a new window]

Abstract

We report on the results concerning the characteristics and the behavior of expanding plasma generated by a Laser Ion Source (LIS). The LIS technique is an efficient means in producing of multi-charged ions utilizing pulsed laser beams. In order to extract Cu ions, in this experiment an XeCl excimer UV laser was employed, providing a power density on the target surface up to 5 × 108 W/cm2. Two typologies of diagnostic systems were developed in order to detect the plasma current and the ion energy. The time-of-flight (TOF) measurements were performed exploiting either a Faraday cup or an Ion Energy Analyzer (IEA). This latter allowed getting quantitative information about the relative ion abundances, their kinetic energy and their charge state. To study the plasma characteristics we measured the total etched material per pulse at 70 mJ. It was 0.235 μg and the overall degree of ionization, 16%. The angular distribution of the ablated material was monitored by optical transmission analysis of the deposited film as a function of the angle with respect to the normal to the target surface. Applying a high voltage to an extraction gap a multi-charged ion beam was obtained; different peaks could be distinguished in the TOF spectrum, resulting from the separation of ions of hydrogen, adsorbed compounds in the target and copper.

Keywords

Ion energy analyzerLaser ion sourceLaser plasma
Type
Research Article
Information
Laser and Particle Beams , Volume 22 , Issue 4 , October 2004 , pp. 461 - 467
Copyright
© 2004 Cambridge University Press

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Anisimov, S. I., Bauerle, D. & Luk'yanchuk, B. S. (1993). Phy. Rev. B 48, 12076–12081.CrossRef
Ciavola, G. & Gammino, S. (1992). Rev. Sci. Instrum. 63, 2881–2882.CrossRef
Dubenkov, V. et al. (1996). Laser Part. Beams 14(3), 385–392.
Henkelmann (1992). Rev. Sci. Instrum. 63, 2828–2830.CrossRef
Kelly, J. (1990). J. Chem. Phy. 92, 5047–5056.
Kondrashev, S. et al. (2000). Rev. Sci. Instrum. 71, 1409–1412.CrossRef
Kruer, W.L. (1986). Laser-plasma interactions 3 (Hooper, M.B., Ed.), pp. 79–85. SUSSP Publications, Edinburgh.
Làska, L. et al. (2000). Rev. Sci. Instrum. 71, 927–930.
Luches, A., Nassisi, V. & Pecoraro, A. (1993). Appl. Phys. B 57, 163–165.
Picardi, L. et al. (1994). Proc. EPAC'94, 2607–2609.
Sharkov, B. Yu. et al. (1998). Rev. Sci. Instrum. 69, 1035–1039.CrossRef
Sherwood, T.R. (1992). Rev. Sci. Instrum. 63, 2789–2793.CrossRef
Torrisi, L. et al. (2003). Appl. Surf. Sci. 210, 262–273.CrossRef
Wong, K., Chan, K., Yeung, K.W. & Lau, K.S. (2003). J. Mater. Process. Technol. 132, 114–118.CrossRef