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Generation of soft X-rays and extreme ultraviolet (EUV) using a laser-irradiated gas puff target

Published online by Cambridge University Press:  30 August 2005

HENRYK FIEDOROWICZ
HENRYK FIEDOROWICZ
Affiliation:
Institute of Optoelectronics, Military University of Technology, Warsaw, Poland
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Abstract

The paper gives a review of investigations on generation of soft X-rays and EUV using a gas puff target irradiated with high-power laser pulses performed during last few years. In the studies a newly developed double-stream gas puff target approach was used. The gas puff targets were irradiated with various lasers, including Nd:glass, Kr:F, Nd:YAG, and iodine lasers. The aim of the studies was to develop efficient and debris-free laser plasma X-ray and EUV sources for applications in microscopy, lithography, micro- and nanotechnology.

Keywords

Extreme ultraviolet (EUV)Gas puff targetLaser plasmasX-rays
Type
Research Article
Information
Laser and Particle Beams , Volume 23 , Issue 3 , September 2005 , pp. 365 - 373
Copyright
© 2005 Cambridge University Press

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Footnotes

This paper was presented at the 28th ECLIM conference in Rome, Italy.

References

REFERENCES

Attwood, D.T. (1999). Soft X-rays and Extreme Ultraviolet Radiation: Principles and Appplications, Cambridge: Cambridge University Press.
Bartnik, A., Biemont, E., Dyakin, V.M., Faenov, A.Ya., Fiedorowicz, H., Goldstein, W.H., Jarocki, R., Kostecki, J., Osterheld, A.L., Palchikov, V.G., Qiu, Yu.B., Skobelev, I.Yu. & Zou, Yu. (1999). Measurements of the ground-state ionization energy and wavelengths for the 1snp 1P10-1s2 1S0 (n = 4–10) lines of OVII. J. Phys. B 30, 4453–4462.Google Scholar
Bartnik, A., Fiedorowicz, H., Rakowski, R., Szczurek, M., Bijkerk, F., Bruijn, R. & Fledderus, H. (2000). Soft x-ray emission from a double-stream gas puff target irradiated by a nanosecond laser pulse. Proc. ECLIM 2000: 26th European Conference on Laser Interaction with Matter, pp. 406–409. Bellingham: SPIE Press.
Bartnik, A., Fiedorowicz, H., Jarocki, R., Juha, L., Kostecki, J., Rakowski, R. & Szczurek, M. (2004). Micromachining of organic polymers by x-ray photo-etching using a 10 Hz laser-plasma radiation source. Microelectron. Engin. 78–79, 452–456.Google Scholar
de Bruijn, R., Bartnik, A., Fledderus, H.F., Fiedorowicz, H., Hageman, P., Constantinescu, R. & Bijkerk, F. (2000). Characterization of a novel double-gas-jet laser plasma EUV source. Proc. Emerging Lithographic Technologies IV, pp. 157–161. Bellingham: SPIE Press.
Celliers, P., DaSilva, L.B., Dane, C.B., Mrowka, S., Norton, M., Harder, J., Hackel, L., Matthews, D., Fiedorowicz, H., Bartnik, A., Maldonado, J. & Abate, J. (1996). Optimization of x-ray sources for proximity lithography produced by a high average power Nd:glass laser. J. Appl. Phys. 79, 8258–8268.Google Scholar
Desai, T., Batani, D., Bernardinello, A., Poletti, G., Orsini, F., Ullschmied, J., Juha, L., Skala, J., Kralikova, B., Krousky, E., Pfeiffer, M., Kadlec, E., Mocek, T., Präg, A., Renner, O., Cotelli, F., Lora Lamia, C. & Zullini, A. (2003). X-ray microscopy of living multicellular organisms with the Prague Asterix Iodine Laser System. Laser Part. Beams 21, 511–516.Google Scholar
Doron, R., Behar, E., Mandelbaum, P., Schwob, J.L., Fiedorowicz, H., Bartnik, A., Jarocki, R., Szczurek, M. & Wilhein, T. (1999). Spectroscopic signature of strong dielectronic recombination in highly ionized xenon produced by irradiation a gas puff with laser. Phys. Rev. A 59, 188–194.Google Scholar
Faenov, A.Y., Pikuz, T., Magunov, A., Batani, D., Lucchini, G., Canova, F. & Piselli, M. (2004). Bright, point X-ray source based on a commercial portable 40 ps Nd:YAG laser system. Laser Part. Beams 22, 373–379.Google Scholar
Fiedorowicz, H., Bartnik, A., Parys, P. & Patron, Z. (1992). Laser plasma X-ray source with a gas puff target. Proc. X-Ray Optics and Microanalysis 1992, pp. 515–518. Philadephia: IOP Publishing.
Fiedorowicz, H., Bartnik, A., Patron, Z. & Parys, P. (1993). X-ray emission from laser-irradiated gas puff targets. Appl. Phys. Lett. 62, 2778–2780.Google Scholar
Fiedorowicz, H., Bartnik, A., Patron, Z. & Parys, P. (1994). Generation of nanosecond soft X-ray pulses in result of interaction of the Nd:glass laser radiation with gas puff targets. Laser Part. Beams 12, 471–483.Google Scholar
Fiedorowicz, H., Bartnik, A., Kostecki, J. & Szczurek, M. (1996a). Debrisless laser-produced x-ray source with a gas puff target. Proc. Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, pp. 310–316. Bellingham: SPIE Press.
Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Szczurek, M. & Wilhein, T. (1998). X-ray emission in the ‘water window’ from a nitrogen gas puff target irradiated with a nanosecond Nd:glass laser pulse. Appl. Phys. B 67, 391–393.Google Scholar
Fiedorowicz, H., Bartnik, A., Szczurek, M., Daido, H., Sakaya, N., Kmetik, V., Kato, Y., Suzuki, M., Matsumura, M., Tajima, J., Nakayama, T. & Wilhein, T. (1999a). Investigation of soft x-ray emission from a gas puff target irradiated with a Nd:YAG laser. Opt. Commun. 163, 103–114.Google Scholar
Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Rakowski, R. & Szczurek, M. (1999b). Characterization and optimization of a laser-produced x-ray source with a gas puff target. Proc. EUV, X-Ray, and Neutron Optics and Sources, pp. 10–20. Bellingham: SPIE Press.
Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Rakowski, R. & Szczurek, M. (2000a). Enhanced X-ray emission in the 1-keV range from a laser-irradiated gas puff atrget produced using the double nozzle setup. Appl. Phys. B 70, 305–308.Google Scholar
Fiedorowicz, H., Bartnik, A., Daido, H., Choi, I.W. & Suzuki, M. (2000b). Strong EUV emission from a double-stream xenon/helium gas puff target irradiated with a Nd:YAG laser. Optics Commun. 184, 161–167.Google Scholar
Fiedorowicz, H., Bartnik, A., Daido, H., Jarocki, R., Rakowski, R., Suzuki, M., Szczurek, M. & Yamagami, S. (2001a). Characterization of a laser-produced x-ray source with a double-stream gas puff target for x-ray and EUV lithography. Proc. Emerging Lithographic Technologies V, pp. 193–202. Bellingham: SPIE Press.
Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Krzywiński, J., Rakowski, R. & Sczurek, M. (2001b). Characterization and optimization of a laser-produced x-ray source with a double-stream gas puff target. Proc. Applications of X Rays Generated from Lasers and Other Bright Sources II, pp. 69–76. Bellingham: SPIE Press.
Fiedorowicz, H., Bartnik, A., Rakowski, R., Szczurek, M., Daido, H., Suzuki, M., Yamagami, S., Choi, I.W. & Tang, H. J. (2001c). Strong soft X-ray emission from a double-stream gas puff target irradiated with a nanosecond Nd:YAG laser. J. Phys. IV France 11, 409–412.Google Scholar
Fiedorowicz, H., Bartnik, A., Horvath, M., Juha, L., Jungwirth, K., Kralikova, B., Krasa, J., Mocek, T., Pfeifer, M., Pina, L., Skala, J., Ullschmied, J. & Wawer, J. (2001d). Investigation of soft x-ray emission in the water window for microscopy using a double-stream gas puff target irradiated with the Prague Asterix Laser System (PALS). Proc. Advances in Laboratory-based X-Ray Sources and Optics II, pp. 47–54. Bellingham: SPIE Press.
Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Mikołajczyk, J., Rakowski, R., Szczurek, A. & Szczurek, M. (2003). Compact laser plasma EUV source based on a gas puff target for metrology. Proc. Emerging Lithography Technologies VI, pp. 389–396. Bellingham: SPIE Press.
Fiedorowicz, H., Bartnik, A., Jarocki, R., Kostecki, J., Krzywiński, J., Rakowski, R., Szczurek, A. & Szczurek, M. (2004a). Compact laser plasma EUV source based on a gas puff target for metrology applications. J. Alloys & Compounds (in print).
Fiedorowicz, H., Bartnik, A., Juha, L., Jungwirth, K., Kralikova, B., Krasa, J., Kubat, P., Pfeifer, M., Pina, L., Prchal, P., Rohlena, K., Skala, J., Ullschmied, J., Horwath, M. & Wawer, J. (2004b). High-brightness laser plasma soft X-ray source using a double-stream gas puff target irradiated with the Prague Asterix Laser System (PALS). J. Alloys & Compounds 362, 67–70.Google Scholar
Fiedorowicz, H., Bartnik, A., Bittner, M., Juha, L., Krasa, J., Kubat, P., Mikołajczyk, J. & Rakowski, R. (2004c). Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source. Microelectr. Engin. 73–74, 336–339.Google Scholar
Gizzi, L.A., Cecchetti, C.A., Galimberti, M., Giulietti, D., Giulietti, A., Koester, P., Labate, L., Laville, S. & Tomassini, P. (2004). Soft laser-plasma X-ray source for differential absorption imaging of tracing elements in thin samples. Laser Part. Beams 22, 367–372.Google Scholar
Juha, L., Krása, J., Cejnarová, A., Chvostová, D., Vorlicek, V., Krzywinski, J., Sobierajski, R., Andrejczuk, A., Jurek, M., Klinger, D., Fiedorowicz, H., Bartnik, A., Pfeifer, M., Kubat, P., Pìna, L., Kravárik, J., Kubes, P., Bakshaev, Yu., Korolev, V. D., Chernenko, A. S., Ivanov, M. I., Scholz, M., Ryc, L., Feldhaus, J., Ullschmied, J. & Boody, F. P. (2003). Ablation of various materials with intense XUV radiation. Nucl. Instr. Meth. Phys. Res. A 507, 577–581.Google Scholar
Jungwirth, K., Cejnarova, A., Juha, L., Kralikova, B., Krasa, J., Krousky, E., Krupickova, P., Laska, L., Masek, K., Mocek, T., Pfeifer, M., Prag, A., Renner, O., Rohlena, K., Rus, B., Skala, J., Straka, P. & Ullschmied, J. (2001). Phys. Plasmas 8, 2495–2503.
Khakhalin, S.Ya., Dyakin, V.M., Faenov, A.Ya., Fiedorowicz, H., Bartnik, A., Parys, P., Nilsen, J. & Osterheld, A. (1994). The dielectronic satellites to the 2s-2p Ne-like krypton resonance lines. Physica Scripta 50, 106–109.Google Scholar
Khakhalin, S. Ya., Dyakin, V.M., Faenov, A.Ya., Fiedorowicz, H., Bartnik, A., Parys, P., Nilsen, J. & Osterheld, A. (1995). Dielectronic 3l4l' Na-like satellites to Ne-like krypton resonance lines. J. Opt. Soc. Am. B 12, 1203–1210.Google Scholar
Kranzusch, S. & Mann, K. (2001). Spectral characterization of EUV radiation emitted from a laser-irradiated gas puff target. Opt. Commun. 200, 223.Google Scholar
Kranzusch, S., Peth, C. & Mann, K. (2001). Spatial characterization of extreme ultraviolet plasmas generated by laser excitation of xenon gas targets. Rev. Sci. Instr. 74, 969–974.Google Scholar
Marzi, S., Giulietti, A., Giulietti, D., Gizzi, L.A. & Salvetti, A. (2000). High brightness laser-plasma X-ray source at IFAM: Characterization and applications. Laser Part. Beams 18, 109–118.Google Scholar
Pikuz, T.A., Faenov, A.Ya., Fraenkel, M., Zigler, A., Flora, F., Bollanti, S., Di Lazzaro, P., Letardi, T., Grilli, A., Palladino, L., Tomassetti, G., Reale, A., Reale, L., Scafati, A., Limongi, T., Bonfigli, F., Alainelli, L. & Sanchez Del Rio, M. (2001). Shadow monochromatic backlighting: Large-field high resolution X-ray shadowgraphy with improved spectral tunability. Laser Part. Beams 19, 285–293.Google Scholar
Rakowski, R., Bartnik, A., Fiedorowicz, H., Jarocki, R., Kostecki, J., Szczurek, A., Szczurek, M. & Foldes, I. (2004). Application of a CCD detector for pulsed x-ray radiography of a gas jet target for laser-matter interaction experiments. Nucl. Instr. Meth. (in print).
Rus, B., Rohlena, K., Skala, J., Kralikova, B., Jungwirth, K., Ullschmied, J., Witte, K.J. & Baumhacker, H. (1999). New high-power laser facility PALS—prospects for laser-plasma research. Laser Part. Beams 17, 179–194.Google Scholar
Skobelev, I.Yu., Faenov, A.Ya., Dyakin, V.M., Fiedorowicz, H., Bartnik, A., Szczurek, M., Beiersdorfer, P., Nilsen, J. & Osterheld, A.L. (1997). High-resolution measurements, line identification, and spectral modeling of the Kβ spectrum of heliumlike argon emitted by a laser-produced plasma using a gas puff target. Phys. Rev E 55, 3773–3776.Google Scholar
Skobelev, I.Yu., Dyakin, V.M., Faenov, A.Ya., Bartnik, A., Fiedorowicz, H., Jarocki, R., Kostecki, J., Szczurek, M., Biemont, E., Quinet, P., Nilsen, J., Behar, E., Doron, R., Mendelbaum, P. & Schwob, J.L. (1999). The x-ray emission spectra of multicharged xenon ions in a gas puff laser-produced plasma. J. Phys. B 32, 113–122.Google Scholar
Spitzer, R., Kauffman, C.R.L., Orzechowski, T., Phillion, D.W. & Cerjan, C. (1993). Soft x-ray production from laser produced plasmas for lithography applications. J. Vac. Sci. Technol. B 11, 2986.Google Scholar
Suzuki, M., Daido, H., Choi, I.W., Wei, Yu., Nagai, K., Norimatsu, T., Mima, K. & Fiedorowicz, H. (2003). Time and space-resolved measurement of a gas-puff laser-plasma x-ray source. Phys. Plasmas 10, 227–233.Google Scholar
Turcu, I.C.E. & Dane, J.B. (1998). X-rays from Laser Plasmas: Generation and Application. New York: Wiley.
Turcu, E., Allot, R., Lisi, N., Batani, D., Bortolotto, F., Massini, A., Milani, M., Ballerini, M., Ferraro, L., Pozzi, A., Prevedi, F. & Rebonato, L. (2004). An ensemble of new techniques to study soft-X-ray-induced variations in cellular metabolism. Laser Part. Beams 22, 323–333.Google Scholar