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Excimer laser plasma to control laser pulse duration

Published online by Cambridge University Press:  09 March 2009

Qihong Lou
Qihong Lou
Affiliation:
Shanghai Institute of Optics and Fine Mechanics, Academia Sinica, P.O. Box 800–211, Shanghai, China
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Abstract

An injection-locking excimer laser beam with a pulse duration of 25 ns is focused on the surface of a polymide film. The laser beam that passes through the etching film is shorter than the original one. By optimizing the thickness of the film and the beam powerdensity, a pulse with a 3-ns pulse duration can be obtained using this switch technology.

Type
Regular Papers
Information
Laser and Particle Beams , Volume 15 , Issue 2 , June 1997 , pp. 235 - 240
Copyright
Copyright © Cambridge University Press 1997

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References

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