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Neoclassical thermal conductivity in ICP plasma at low pressure

Published online by Cambridge University Press:  01 June 2008

A.P. SMIRNOV ,
W. PARK ,
YA.N. ISTOMIN ,
D.P. KOSTOMAROV ,
E.A. SHEINA ,
A. B. SHMLEV  and
V. N. VOLYNETS
A.P. SMIRNOV
Affiliation:
Department of Computational Mathematics and Cybernetics, Moscow State University, Vorobievy Gory, Moscow 119899, Russia ([email protected])
W. PARK
Affiliation:
Mechatronics and Manufacturing Technology Center, Samsung Electronics Co., Ltd., 416 Maetan-3Dong, Suwon City, Kyunggi-do 443-742, Korea
YA.N. ISTOMIN
Affiliation:
Lebedev Physical Institute, Leninsky Prosp. 53, Moscow 119991, Russia
D.P. KOSTOMAROV
Affiliation:
Department of Computational Mathematics and Cybernetics, Moscow State University, Vorobievy Gory, Moscow 119899, Russia ([email protected])
E.A. SHEINA
Affiliation:
Department of Computational Mathematics and Cybernetics, Moscow State University, Vorobievy Gory, Moscow 119899, Russia ([email protected])
A. B. SHMLEV
Affiliation:
Department of Computational Mathematics and Cybernetics, Moscow State University, Vorobievy Gory, Moscow 119899, Russia ([email protected])
V. N. VOLYNETS
Affiliation:
Mechatronics and Manufacturing Technology Center, Samsung Electronics Co., Ltd., 416 Maetan-3Dong, Suwon City, Kyunggi-do 443-742, Korea
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Abstract

The plasma temperature in a new plasma source shows unusual behaviour at low pressures (about 1 mTorr) and high absorbed powers. In Ar plasma at pressures of about 1 mTorr, the electron temperature shows a pronounced maximum inside an electromagnetic accelerator, which is followed by a rapid drop at the boundary between the accelerator region and the main chamber. In this paper a neoclassical thermo-conductivity model based on the analysis of the electron trajectories is proposed to describe the sharp electron temperature profile. Quantitative agreement of the calculated temperature profile with the experiment is observed.

Type
Papers
Information
Journal of Plasma Physics , Volume 74 , Issue 3 , June 2008 , pp. 353 - 360
Copyright
Copyright © Cambridge University Press 2007

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