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The electronic identity of inductive and capacitive plasmas

Published online by Cambridge University Press:  01 April 2008

K. T. A. L. BURM
K. T. A. L. BURM*
Affiliation:
PlasmAIX for Plasma Research, Xantenstraat 32, 2440 Geel, Belgium ([email protected])
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Abstract

An electronic identity relation, relating capacitively coupled plasma sources to corresponding inductively coupled plasma sources, has been derived, starting from the Maxwell relations for matter and the characteristics of a capacitor and of an inductor. Furthermore, the breakdown conditions for both capacitively coupled plasmas and for inductively coupled plasmas as well as their optimal operation frequency ranges are discussed.

Type
Papers
Information
Journal of Plasma Physics , Volume 74 , Issue 2 , April 2008 , pp. 155 - 161
Copyright
Copyright © Cambridge University Press 2007

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