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Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure

Published online by Cambridge University Press:  03 July 2012

YINAN WANG ,
YUE LIU ,
SHU ZHENG  and
GUOQIANG LIN
YINAN WANG
Affiliation:
Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China ([email protected])
YUE LIU
Affiliation:
Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China ([email protected])
SHU ZHENG
Affiliation:
Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China ([email protected])
GUOQIANG LIN
Affiliation:
Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China ([email protected])
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Abstract

A one-dimensional fluid model is built to study the effect of radio frequency (RF) on the characteristics of RF nitrogen discharge with induced argon plasma at high pressure. The model is solved by a finite difference method, and the numerical results are obtained. The numerical results show that by modulating driven frequency, the discharge can obtain higher plasma density. Moreover, the discharge is operated in a stable α mode in a range of 100 MHz of driven frequency.

Type
Papers
Information
Journal of Plasma Physics , Volume 78 , Issue 6 , December 2012 , pp. 673 - 676
Copyright
Copyright © Cambridge University Press 2012

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