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Wrinkling of a Debonded Initially Compressed Si1−XGex Film

Published online by Cambridge University Press:  05 May 2011

A. I. Fedorchenko ,
A.-B. Wang ,
V. I. Mashanov  and
H.-H. Cheng
A. I. Fedorchenko*
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan 106, R.O.C.
A.-B. Wang*
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan 106, R.O.C.
V. I. Mashanov*
Affiliation:
Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan 106, R.O.C.
H.-H. Cheng*
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan 106, R.O.C.
*
* Professor
* Professor
** Ph.D.
* Professor
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Abstract

A compressively strained pseudomorphic Si1−xGex film being debonded from Si substrate by selective etching forms wrinkles with a uniform space periodicity. The present study provides experimental evidences and a theoretical model for the wrinkling process. To allow large deflection, non-linear Von Karman plate theory is employed. The amplitude and wavelength of wrinkles are determined by minimizing the total free energy of a debonded wrinkled film. The wrinkling analysis has shown that the amplitude and wavelength of wrinkled film are an outcome of a subtle compromise between bending energy, and normal and shearing components of the stretching energy. The wave number nondimentionalized over the depth of etch is a function of the membrane strain of a bonded film, Poisson's ratio, and the nondimensional film thickness.

Keywords

Thin filmsStress relaxationWrinklingSi-Ge alloys
Type
Articles
Information
Journal of Mechanics , Volume 21 , Issue 3 , September 2005 , pp. 131 - 135
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2005

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