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Numerical Assessment of Compressive Deformation in Metal-Ceramic Multilayer Micro-Pillars

Published online by Cambridge University Press:  30 October 2017

G. Tang*
Affiliation:
College of Materials Science and Engineering Shenzhen Key Laboratory of Polymer Science and Technology Guangdong Research Center for Interfacial Engineering of Functional Materials Nanshan District Key Lab for Biopolymers and Safety Evaluation Shenzhen University Shenzhen, China Key Laboratory of Optoelectronic Devices and System of Ministry of Education and Guangdong Province College of Optoelectronic Engineering Shenzhen University Shenzhen, China
Y. L. Shen
Affiliation:
Department of Mechanical Engineering University of New Mexico Albuquerque, USA
*
*Corresponding author ([email protected].)
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Abstract

A numerical study was undertaken to investigate the mechanical properties of metal-ceramic multilayer micro-pillars under compression. The model system contains alternating layers of aluminum (Al) and silicon carbide (SiC) above a thick silicon (Si) substrate. The finite element analyses show that the pillar deformed in a non-uniform manner under compression, especially when a tapered side wall was included in the model. The heterogeneous feature of the structure plays a significant role in influencing the apparent stress-strain response. The elastic property of the pillar compares favorably with the true composite modulus, but a large discrepancy was found in the plastic response. The difference in deformation behavior between homogeneous pillars and multilayer pillars, along with other geometric effects, were examined in detail.

Type
Research Article
Copyright
© The Society of Theoretical and Applied Mechanics 2017 

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