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Effect of Dielectric-Layer on the Stress Field of Micro Cantilever Beams at the Onset of Pull-In Instability

Published online by Cambridge University Press:  14 November 2013

E. Yazdanpanahi ,
A. Noghrehabadi  and
M. Ghalambaz
E. Yazdanpanahi
Affiliation:
Department of Mechanical Engineering, Shahid Chamran University of Ahvaz Ahvaz, Iran
A. Noghrehabadi*
Affiliation:
Department of Mechanical Engineering, Shahid Chamran University of Ahvaz Ahvaz, Iran
M. Ghalambaz
Affiliation:
Department of Mechanical Engineering, Shahid Chamran University of Ahvaz Ahvaz, Iran
*
[email protected]
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Abstract

In this paper, stress distribution of micro cantilever beams in the presence of a dielectric-layer is studied using an analytic method. The Modified Adomian Decomposition Method (MADM) is applied to obtain a semi-analytical solution for a distributed parameter model of the micro cantilever beam. The important parameters for designing and manufacturing micro-actuators such as shear force, bending moment and stress distribution along the cantilevers are computed for different values of the dielectric-layer parameter. The results of MADM are compared with the numerical results, and they found in good agreement. It is found that increase of the dielectric-layer parameter increases the dimensionless pull-in voltage, tip deflection, internal stress and bending moment of the micro cantilever actuators at the onset of pull-in instability.

Keywords

Stress resultantsMicro cantileverPull-inDielectric layer
Type
Research Article
Information
Journal of Mechanics , Volume 30 , Issue 1 , February 2014 , pp. 49 - 56
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2014 

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