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Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures

Published online by Cambridge University Press:  15 July 2015

L.-J. Yang  and
S. Marimuthu
L.-J. Yang*
Affiliation:
Department of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei, Taiwan
S. Marimuthu
Affiliation:
Department of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei, Taiwan
*
*Corresponding author ([email protected])
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Abstract

This note presents an elasto-capillary model of a cantilever subject to capillary stiction during drying process of removing sacrificial layers in MEMS. Similar to the dynamic analysis of the electrostatic pull-in of electrostatic micro actuators, the cantilever beam tends to be pulled down to the substrate due to the nonlinear capillary force with respect to the gap. The critical one-half gap deformation and the corresponding critical wetting area for pulling down a micro cantilever by surface tension are analytically found herein. The instability situation of a generalized critical deformation for power-law surface force with respect to gap is also predicted accordingly. Some prior MEMS works are exemplified to justify this critical one-half gap deformation for capillary stiction.

Keywords

StictionSurface tensionCantileverCritical gap
Type
Research Article
Information
Journal of Mechanics , Volume 32 , Issue 1 , February 2016 , pp. 19 - 24
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2016 

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