Hostname: page-component-78c5997874-t5tsf Total loading time: 0 Render date: 2024-11-19T02:15:17.312Z Has data issue: false hasContentIssue false
  • English
  • Français

Sensing and Control of Aerodynamic Separation by MEMS

Published online by Cambridge University Press:  05 May 2011

Gwo-Bin Lee ,
Adam Huang ,
Chih-Ming Ho ,
Fukang Jiang ,
Charles Grosjean  and
Yu-Chong Tai
Gwo-Bin Lee*
Affiliation:
Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
Adam Huang
Affiliation:
Department of Mechanical & Aerospace Engineering, University of California, Los Angeles, California, U.S.A.
Chih-Ming Ho*
Affiliation:
Department of Mechanical & Aerospace Engineering, University of California, Los Angeles, California, U.S.A.
Fukang Jiang
Affiliation:
Department of Electrical Engineering, California Institute of Technology, California, U.S.A.
Charles Grosjean
Affiliation:
Department of Electrical Engineering, California Institute of Technology, California, U.S.A.
Yu-Chong Tai*
Affiliation:
Department of Electrical Engineering, California Institute of Technology, California, U.S.A.
*
*Assistant Professor
**Professor
***Associate Professor
Get access

Abstract

During the last decade, we have applied MEMS-based transducers to develop a technology for maneuvering aircraft by sensing and controlling the separation around the leading edge of a delta wing. In this paper, we will summarize our experience of this endeavor.

Keywords

MEMSActive flow controlMicro actuatorsMicro shear stress sensors
Type
Invited Paper
Information
Journal of Mechanics , Volume 16 , Issue 1 , March 2000 , pp. 45 - 52
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Madou, M., Fundamentals of Microfabrication, CRC Press, Boca Raton, Florida (1997).Google Scholar
2Kovac, G. T. A., Micromachined Transducers Soucebook, McGraw-Hill, New York (1998).Google Scholar
3Coe, D. J., Allen, M. G., Smith, B. L. and Glezer, A., “Addressable Micromachined Jet Arrays,” TRANSDUCERS '95, Stockhom, Sweden (1995).Google Scholar
4Jacobson, S. A. and Reynolds, W. C., “Active Boundary Layer Control Using Flush Mounted Surface Actuators,” Bull. Ann. Phys. Soc., 38(12), p. 2197 (1993).Google Scholar
5Tsao, T., Liu, C., Tai, Y. C. and Ho, C. M., “Micromachined Magnetic Actuators for Active Fluid Control,” Proceedings of ASME Application of Microfabrication to Fluid Mechanics, FED-Vol. 197, pp. 31–38 (1994).Google Scholar
6Grosjean, C., Lee, G. B., Hong, W., Tai, Y. C., Ho, C. M., “Micro Balloon Actuators for Aerodynamic Control,” IEEE MEMS-98 Workshop, German (1998).Google Scholar
7Smith, B. L. and Glezer, A., “Jet Vectoring by Synthetic Jet Actuators,” Bull. Am. Phys. Soc. 40, p. 2025 (1995).Google Scholar
8Gad-el-Hak, M., “Interactive Control of Turbulent Boundary Layers: a Futuristic Overview,” AIAA Journal, 32(9), pp.1753–1765 (1994).Google Scholar
9Ho, C. M. and Tai, Y. C., “Micro-Electro-Mechanical-Systems and Fluid Flows,” Annual Review of Fluid Mechanics, 30, pp. 579–612 (1998).Google Scholar
10Jacobson, S. A. and Reynolds, W. C., “Active Control of Boundary Layer Wall Shear Stress Using Self-Learning Neural Networks,” AIAA Paper No. 93–3272 (1993).Google Scholar
11Tung, S., Hong, W., Ho, C. M., Liu, C. and Tai, Y. C., “Control of Streamwise Vortices in 2-D Channel Flows,” Proceedings of the 6th Congress of Asian Fluid Mechanics, Singapore, 2, p. 85 (1995).Google Scholar
12Lee, G. B., Ho, C. M., Jiang, F., Liu, C., Tsao, T. and Tai, Y. C., “Distributed Flow Control by MEMS,” Proceedings of the ASME 1996 International Mechanical Engineering Congress and Exposition, Atlanta, Nov. 17–22, pp. 145–150 (1996).Google Scholar
13Lee, G. B., “Control of a Delta-Wing Aircraft by Using Micromachined Sensors and Actuators,” Ph.D. Thesis, Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, U.S.A. (1998).Google Scholar
14Lee, G. B., Chiang, S., Tai, Y. C., Tsao, T. and Ho, C. M., “Robust Vortex Control of a Delta Wing Using Distributed MEMS Actuators,” accepted, Journal of Aircraft (2000).CrossRefGoogle Scholar
15Ho, C. M. and Huang, L. S., “Subharmonics and Vortex Merging in Mixing Layers,” Journal of Fluid Mechanics, 119, pp. 443–473 (1982).CrossRefGoogle Scholar
16Werle, H., “Flow Visualization Techniques for the Study of High Incidence Aerodynamics,” in High Angle-of-Attack Aerodynamics, AGARD/VKI Lecture Series, No. 121, Paper No.3 (1982).Google Scholar
17Marchman, J. F. III, “Effect of Heating on Leading Edge Vortices in Subsonic Flow,” Journal of Aircraft, 12(2), pp. 121–123 (1975).CrossRefGoogle Scholar
18Hool, J. H., “Measurement of Skin Friction Using Surface Tubes,” Aircraft Eng., 28, p. 52 (1956).CrossRefGoogle Scholar
19East, L. F., “Measurement of Skin Friction at Low Subsonic Speeds by the Razor-Blade Technique,” R&M 3525, Aero. Res. Counc., London (1966).Google Scholar
20Goldstein, R. J., Fluid Mechanics Measurement, Hemisphere Publishing Co., p. 61 (1983).Google Scholar
21Preston, J. H., “The Determination of Turbulent Skin Friction by Means of Pitot Tubes,” J. R. Aero. Soc., 58, pp. 109–121 (1953).CrossRefGoogle Scholar
22Schmidt, M. A., Howe, R. T., Senturia, S. D. and Haritonidis, J. H., “Design and Calibration of a Microfabricated Floating-Element Shear-Stress Sensor,” IEEE Trans. Electron Devices, 35, pp. 750–757 (1998).CrossRefGoogle Scholar
23Shajii, J., Ng, K. Y. and Schmidt, M. A., “A Microfabricated Floating-Element Shear Stress Sensor Using Wafer-Bonding Technology,” IEEE/ASME J. Microelectromechanicalsystems, 1, pp. 89–94 (1992).CrossRefGoogle Scholar
24Pan, T., Hyman, D., Mehregany, M., Reshotko, E. and Willis, B., “Calibration of Microfabricated Shear Stress Sensor,” Digest of Technical Papers, TRANSDUCERS'95, Stockholm, pp. 443–446 (1994).Google Scholar
25Mehregany, M. and Bang, C. “MEMS for Smart Structures,” Proc. Smart Structures and Materials. pp. 105–114 (1995).Google Scholar
26Padmanabhan, A., Goldberg, H. D., Breuer, K. S. and Schmidt, M. A., “A Silicon Micromachined Floating-Element Shear-Stress Sensor with Optical Position Sensing by Photodiodes,” Digest of Technical Papers, TRANSDUCERS'95, Stockholm, pp. 436–439 (1995).Google Scholar
27Jiang, F., Tai, Y. C., Gupta, B., Goodman, R., Tung, S., Huang, J. B. and Ho, C. M., “Micromachined Shear Stress Sensor Array,” Proc. IEEE MEMS-96 Workshop, San Diego, pp. 110–115 (1996).Google Scholar
28Huang, J. B., Jiang, F. K., Tai, Y. C. and Ho, C. M., “A Micro-Electro-Mechanical-System-Based Thermal Shear Stress Sensor with Self-Frequency Compensation,” Meas. Sci. Technol, 10, pp. 687–696 (1999).CrossRefGoogle Scholar
29Jiang, F., Tai, Y. C., Ho, C. M., Karan, R. and Garstenauer, M., “Theoretical and Experimental Studies of Micromachined Hot-Wire Anemometers,” Technical Digest, International Electron Devices Meeting, San Francisco, CA, pp. 139–142 (1994).Google Scholar
30Liu, C., Huang, J. B., Zhu, A., Jiang, F., Tung, S., Tai, Y. C. and Ho, C. M., “A Micromachined Flow Shear Stress Sensor Based on Thermal Transfer Principles,” IEEE/ASME J. of Microelectro-mechanical Systems (J.MEMS) (1999).Google Scholar
31Jiang, F., Lee, G. B., Tai, Y. C. and Ho, C. M., “A Flexible Micromachine-Based Shear-stress Sensor Array and Its Application to Separation-Point Detection,” Accepted, Sensors and Actuators A: Physical (1999).Google Scholar
32Liu, C., Tsao, T., Lee, G. B., Leu, T. S., Tai, Y. C. and Ho, C. M., “Out-of-Plane Magnetic Actuators with Electroplated Permalloy for Fluid Dynamics Control,” Sensors And Actuators A: Physical, 78, Issue: 2-3, pp. 71–242 (1999).CrossRefGoogle Scholar
33Liu, C., Tsao, T. and Tai, Y. C., “A High-Yield Drying Process for Surface Microstructures Using Active Levitation,” 1997 International Conference on Solid-State Sensors and Actuators (Transducers 97), June (1997).Google Scholar
34Lee, G. B., Tai, Y. C., Grosjean, C. and Ho, C. M., “Application of Micromachined Balloon Actuators on Control of Leading-edge Vortices of a Delta Wing,” Proc. 22nd National Conference on Theoretical and Applied Mechanics, Taiwan, ROC (1998).Google Scholar
35Polhamus, E. C., “Predictions of Vortex-Lift Characteristics by a Leading-Edge Suction Analogy,” Journal of Aircraft, 8(4), pp. 193–199 (1971).Google Scholar
36Liu, C., Tsao, T., Tai, Y. C., Leu, T. -S., Ho, C. -M., Tang, W. and Miu, D., “Micromachined Permalloy Magnetic Actuator for Delta-Wing Control,” Proceedings from IEEE Micro Electro Mechanical Systems, Germany, pp. 332–335 (1995).Google Scholar
37Ho, C. M., Huang, P. H., Lew, J., Mai, J. D., Lee, G. B. and Tai, Y. C., “Intelligent System Capable of Sensing-Computing-Actuating,” Keynote Address, 4th International Conference on Intelligent Materials, Society of Non-Traditional Technology, Tokyo, Japan (1998).Google Scholar
38Ho, C. M., Huang, P. H., Yang, J. M., Lee, G. B. and Tai, Y. C., “Active Flow Control by MicroSystems,” FLOWCON, International Union of Theoretical and Applied Mechanics (IUTAM) Symposium on Mechanics of Passive and Active Flow Control, Gottingen, Germany, pp. 18–19 (1998).Google Scholar