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A Method Integrating Optimal Algorithm and FEM on CMOS Residual Stress

Published online by Cambridge University Press:  08 August 2013

W. C. Chuang ,
David T. W. Lin ,
Y.-C. Hu ,
H.-L. Lee ,
C.-H. Cheng ,
P.-Z. Chang  and
N. B. Quyen
W. C. Chuang
Affiliation:
Department of Mechanical and Electro-mechanical Engin eering, National Sun Yat-sen University, Kaoshiung, Taiwan 80424, R.O.C.
David T. W. Lin*
Affiliation:
Institute of Mechatronic System Engineering, National University of TainanTainan, Taiwan 70005, R.O.C.
Y.-C. Hu
Affiliation:
Department of Mechanical and Electromechanical Engineering, National ILan University, ILan, Taiwan 26047, R.O.C.
H.-L. Lee
Affiliation:
MicroSystems Technology Center, Industrial Technology Research Institute, Tainan, Taiwan 70955, R.O.C.
C.-H. Cheng
Affiliation:
Department of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
P.-Z. Chang
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
N. B. Quyen
Affiliation:
Institute of Mechatronic System Engineering, National University of Tainan, Tainan, Taiwan 70005, R.O.C.
*
*[email protected]
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Abstract

Residual stress in MEMS is of inherent importance in various respects. This study proposes a specific method using ANSYS including the birth and death method and combined with the optimal method (SCGM) to reduce the residual stresses during the CMOS fabrication process. The suitable cooling temperature for decreasing the residual stress is proposed and available. It demonstrates that the suitable parameter on the fabrication can reduce the residual stress in MEMS devices without any extra manufacturing process or external apparatus. The proposed method can expand to simulate the realistic MEMS model effectively.

Keywords

OptimizationResidual stressCMOS fabricationSCGM
Type
Research Article
Information
Journal of Mechanics , Volume 30 , Issue 2 , April 2014 , pp. 123 - 128
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2013 

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References

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