Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-26T08:22:09.882Z Has data issue: false hasContentIssue false
  • English
  • Français

Analysis of Surface Acoustic Waves in Layered Piezoelectric Media and its Applications to the Design of Saw Devices

Published online by Cambridge University Press:  05 May 2011

T.-T. Wu  and
Y.-Y. Chen
T.-T. Wu*
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
Y.-Y. Chen*
Affiliation:
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
*
*Professor
**Post Doctor
Get access

Abstract

In this paper, we utilized a Stroh based formulation for solving problems of surface waves in layered piezoelectric media, and then, applied it to analyze surface acoustic wave (SAW) devices. The determination of the optimal cut of a piezoelectric crystal and the choice of the best propagation of SAW devices were given. The dispersion induced by a thin metal layer on SAW propagation in a SAW device was analyzed and discussed. Finally, we applied the formulation to calculate the effective permittivity and phase velocity dispersion of a LiNbO3/Diamond layered SAW device. Both of the null frequency bandwidth and the insertion loss of the dispersive SAW device were obtained.

Keywords

Stroh formalismSAWPiezoelectricLayered medium.
Type
Articles
Information
Journal of Mechanics , Volume 19 , Issue 1 , March 2003 , pp. 225 - 232
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Stroh, A. N., “Steady State Problems in Anisotropic Elasticity,” J. Math. Phys., 41, pp. 77–103 (1962).CrossRefGoogle Scholar
2Ting, T. C. T., Anisotropic Elasticity: Theory and Applications, Oxford University Press (1996).CrossRefGoogle Scholar
3Ting, T. C. T., “Recent Developments in Anisotropic Elasticity,” Intl. Solids Structures, 37, pp. 401–409 (2000).CrossRefGoogle Scholar
4Ingebrigtsen, K. A. and Tonning, A., “Elastic Surface Waves in Crystals,” Physical Review, 184(3), pp. 942–951 (1969).CrossRefGoogle Scholar
5Fahmy, A. H. and Adler, E. L., “Propagation of Acoustic Surface Waves in Multilayers: a Matrix Description,” Appl. Physics Letters, 22(10), May, pp. 495–497 (1973).CrossRefGoogle Scholar
6Honein, B., Braga, A. M. B., Barbone, P. and Herrmann, G., “Wave Propagation in Piezoelectric Layered Media with Some Applications,” J. Intelligent Material Systems and Structures, 2(4), pp. 542–557 (1991).CrossRefGoogle Scholar
7Wu, T.-T. and Chen, Y.-Y., “Exact Analysis of Dispersive SAW Devices on ZnO/Diamond/Si Layered Structures,” IEEE UFFC, 49(1), pp. 142–149 (2002).Google ScholarPubMed
8White, R. M. and Voltmer, F. W., “Direct Piezoelectric Coupling to Surface Elastic Waves,” Appl. Phys. Lett., 7, December 15, pp. 314–316 (1965).CrossRefGoogle Scholar
9Campbell, C. K., Surface Acoustic Wave Devices for Mobile and Wireless Communications, Academic Press, Inc., San Diego (1998).Google Scholar
10Ballantine, , et al., Acoustic Wave Sensors: Theory, Design, and Physico-Chemical Applications, Academic Press, Inc., San Diego (1997).CrossRefGoogle Scholar
11Yamanouchi, K., Sakuri, N. and Satoh, T., “SAW Propagation Characteristics and Fabrication Technology of Piezoelectric Thin Film/Diamond Structure,” Proc. IEEE Ultrason. Symp., pp. 351–354 (1989).CrossRefGoogle Scholar
12Nakahata, H., Higaki, K., Hachigo, A., Shikata, S., Fukmori, N., Takahashi, Y., Kajihara, T. and Yamamoto, Y., “High Frequency Surface Acoustic Wave Filter Using ZnO/Diamond/Si Structure,” Jpn, J. Appl. Phys, Part 1, 33(1), pp. 324–328 (1994).CrossRefGoogle Scholar
13Nakahata, H., Higaki, K., Hachigo, A., Fujii, S., Uemura, T. and Shikata, S., “Diamond SAW Filter for 2.488 Gbps Retiming,” IEEE Ultrason. Symp., pp. 319–322 (1998).Google Scholar
14Morgan, D. P., Surface-Wave Devices for Signal Processing, Elsevier, New York (1991).Google Scholar
15Oliner, A. A., Acoustic Surface Waves — Topics in Applied Physics, 24, Springer-Verlag Berlin Heidelberg, New York (1978).CrossRefGoogle Scholar
16Auld, B. A., Acoustic Fields and Waves in Solids, 1, Florida: R.E. Krieger Publishing Company, New York: Wiley (1990).Google Scholar
17Kovacs, G., Anhorn, M., Engan, H. E., Visintini, G. and Ruppel, C. C. W., “Improved Material Constants for LiNbO3,” IEEE Ultrason. Symp., pp. 435–438 (1990).CrossRefGoogle Scholar
18Wu, T.-T., Chen, Y.-Y. and Chou, T.-T., “Analysis of Frequency Response of a Dispersive Layered SAW Filter Using Effective Permittivity and Coupling of Modes Model,” submitted.Google Scholar