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Thick beryllium coatings by ion-assisted magnetron sputtering

Published online by Cambridge University Press:  24 November 2011

Hongwei Xu ,
Craig Alford ,
Eric Chason ,
Andrew J. Detor ,
Tim Fuller ,
Alex V. Hamza ,
Jeff Hayes ,
Kari A. Moreno ,
Abbas Nikroo  and
Tony van Buuren
...Show all authors
Hongwei Xu*
Affiliation:
General Atomics, San Diego, California 92186-5608
Craig Alford
Affiliation:
Materials Science and Technology Division, Lawrence Livermore National Laboratory, Livermore, California 94550
Eric Chason
Affiliation:
Department of Engineering, Brown University, Providence, Rhode Island 02912
Andrew J. Detor
Affiliation:
Materials Science and Technology Division, Lawrence Livermore National Laboratory, Livermore, California 94550
Tim Fuller
Affiliation:
General Atomics, San Diego, California 92186-5608
Alex V. Hamza
Affiliation:
Materials Science and Technology Division, Lawrence Livermore National Laboratory, Livermore, California 94550
Jeff Hayes
Affiliation:
General Atomics, San Diego, California 92186-5608
Kari A. Moreno
Affiliation:
General Atomics, San Diego, California 92186-5608
Abbas Nikroo
Affiliation:
General Atomics, San Diego, California 92186-5608
Tony van Buuren
Affiliation:
Materials Science and Technology Division, Lawrence Livermore National Laboratory, Livermore, California 94550
Yinmin Wang
Affiliation:
Materials Science and Technology Division, Lawrence Livermore National Laboratory, Livermore, California 94550
Jun-jim Wu
Affiliation:
General Atomics, San Diego, California 92186-5608
Heather Wilkens
Affiliation:
General Atomics, San Diego, California 92186-5608
Kelly P. Youngblood
Affiliation:
General Atomics, San Diego, California 92186-5608
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Thick (>150 μm) beryllium coatings are studied as an ablator material of interest for fusion fuel capsules for the National Ignition Facility. DC magnetron sputtering is used because of the relative controllability of the processing temperature and energy of the deposits. However, coatings produced by DC magnetron sputtering leak the fuel gas D2. By using ion-assisted DC magnetron, sputtered coatings can be made that are leak-tight. Transmission electron microscopy (TEM) studies revealed microstructural changes that lead to leak-tight coating. Ultrasmall angle x-ray spectroscopy is used to characterize the void distribution and volume along the spherical surface along with a combination of focused ion beam, scanning electron microscope, and TEM. An in situ multibeam optical stress sensor was used to measure the stress behavior of thick beryllium coatings on flat substrates as the material was being deposited.

Keywords

BeSputteringStress/strain relationship
Type
Articles
Information
Journal of Materials Research , Volume 27 , Issue 5: Focus Issue: Plasma and Ion-Beam Assisted Materials Processing , 14 March 2012 , pp. 822 - 828
Copyright
Copyright © Materials Research Society 2011

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