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Surface stress model for intrinsic stresses in thin films

Published online by Cambridge University Press:  31 January 2011

R. C. Cammarata ,
T. M. Trimble  and
D. J. Srolovitz
R. C. Cammarata
Affiliation:
Department of Materials Science and Engineering, Johns Hopkins University, Baltimore, Maryland 21218, and Department of Physics and Astronomy, University of Maryland, College Park, Maryland 20742
T. M. Trimble
Affiliation:
Department of Materials Science and Engineering, Johns Hopkins University, Baltimore, Maryland 21218, and Department of Physics and Astronomy, University of Maryland, College Park, Maryland 20742
D. J. Srolovitz
Affiliation:
Princeton Materials Institute and Department of Mechanical and Aerospace Engineering, Princeton University, Princeton, New Jersey 08544
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Abstract

A simple model was presented for intrinsic stress generation in thin films resulting from surface stress effects. This mechanism can explain the origin of compressive stresses often observed during island growth prior to coalescence, as well as intrinsic compressive stresses reported for certain continuous, fully grown films. In some cases, surface stress effects may contribute to a sudden change in the intrinsic stress during island coalescence.

Type
Articles
Information
Journal of Materials Research , Volume 15 , Issue 11 , November 2000 , pp. 2468 - 2474
Copyright
Copyright © Materials Research Society 2000

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