Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-26T03:28:57.206Z Has data issue: false hasContentIssue false

Sputtering pressure dependence of hydrogen-sensing effect of palladium films

Published online by Cambridge University Press:  31 January 2011

Chung Wo Ong*
Affiliation:
Department of Applied Physics and Materials Research Center, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong, People's Republic of China
Yu Ming Tang
Affiliation:
Department of Applied Physics and Materials Research Center, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong, People's Republic of China
*
a) Address all correspondence to this author. e-mail: [email protected]
Get access

Abstract

The electrical resistivity ρ of palladium (Pd) films prepared by using magnetron sputtering at different pressures φ ranging from 2 to 15 mTorr showed very different hydrogen (H)-induced response. This reaction is because the mean free path of the particles in vacuum changes substantially with φ, such that the structure of the deposits is altered accordingly. A film prepared at a moderate φ value of 6 mTorr has a moderate strength. After a few hydrogenation-dehydrogenation cycles, some cracks are generated because of the great difference in the specific volumes of the metal and hydride phases. Breathing of the cracks in subsequent switching cycles occurred, which led to the response gain of ρ, defined as the resistivity ratio of the dehydrogenated-to-hydrogenated states during a cycle, to increase to 17. This result demonstrates the attractiveness of using the Pd films in H2 detection application. The H-induced resistive response of the films prepared at other φ values was found to be much smaller.

Type
Articles
Copyright
Copyright © Materials Research Society 2009

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1Mubeen, S., Zhang, T., Yoo, B., Deshusses, M.A., and Myung, N.V.: Palladium nanoparticles decorated single-walled carbon nanotube hydrogen sensors. J. Phys. Chem. C 111, 6321 (2007)Google Scholar
2Zhao, Z., Knight, M., Kumar, S., Eisenbraun, E.T., and Carpenter, M.A.: Humidity effects on Pd/Au-based all-optical hydrogen sensors. Sens. Actuators, B 129, 726 (2008)CrossRefGoogle Scholar
3Jewell, L.L. and Davis, B.H.: Review of absorption and absorption in the hydrogen-palladium system. Appl. Catal., A 310, 1 (2006)CrossRefGoogle Scholar
4Kiefer, T., Favier, F., Vazquez-Mena, O., Villanueva, G., and Brugger, J.: A single nanotrench in a palladium microwire for hydrogen detection. Nanotechnolog y 19, 125502 (2008)CrossRefGoogle Scholar
5Lewis, F.A.: The Palladium Hydrogen System (Academic Press, New York, 1967), p. 15.Google Scholar
6Lewis, F.A.: The Palladium Hydrogen System (Academic Press, New York, 1967), p. 51.Google Scholar
7Christofides, C. and Mandelis, A.: Solid-state sensors for trace hydrogen gas detection. J. Appl. Phys. 68, R1 (1990).CrossRefGoogle Scholar
8Kumar, M.K., Rao, M.S.R., and Ramaprabhu, S.: Structural, morphological and hydrogen sensing studies on pulsed laser deposited nanostructured palladium thin films. J. Phys. D: Appl. Phys. 39, 2791 (2006)Google Scholar
9Lewis, F.A.: The Palladium Hydrogen System (Academic Press, New York, 1967), p. 142.Google Scholar
10Owen, E.A. and Jones, J.I.: The effect of pressure and temperature on the occlusion of hydrogen by palladium. Proc. Phys. Soc. 49, A587 (1937).CrossRefGoogle Scholar
11Barton, J.C., Woodward, I., and Lewis, F.A.: Hysteresis of relationships between electrical resistance and hydrogen content of palladium. Trans. Faraday Soc. 59, 1201 (1963)CrossRefGoogle Scholar
12Sakamoto, Y. and Takashima, I.: Hysteresis behaviour of electrical resistance of the Pd–H system measured by a gas-phase method. J. Phys.: Condens. Matter 8, 10511 (1996)Google Scholar
13Favier, F., Walter, E.C., Zach, M.P., Benter, T., and Penner, R.M.: A pyrolytic, carbon-stabilized, nanoporous Pd film for wide-range H2 sensing. Science 293, 2227 (2001)CrossRefGoogle Scholar
14Dankert, O. and Pundt, A.: Hydrogen-induced percolation in discontinuous films. Appl. Phys. Lett. 81, 1618 (2002)CrossRefGoogle Scholar
15Xu, T., Zach, M.P., Xiao, Z.L., Rosenmann, D., Welp, U., Kwok, W.K., and Crabtree, G.W.: Self-assembled monolayer-enhanced hydrogen sensing with ultrathin palladium films. Appl. Phys. Lett. 86, 203104 (2005)CrossRefGoogle Scholar
16Ding, D. and Chen, Z.: A pyrolytic, carbon-stabilized, nanoporous Pd film for wide-range H2 sensing. Adv. Mater. 19, 1996 (2007)CrossRefGoogle Scholar
17Tsang, M.P., Ong, C.W., Chong, N., Choy, C.L., Lim, P.K., and Hung, W.W.: Mechanical and etching properties of dual ion beam deposition hydrogen-free silicon nitride films. J. Vac. Sci. Technol., A 19, 2542 (2001)Google Scholar
18Stelmack, L.A., Thurman, C.T., and Thompson, G.R.: Review of ion-assisted deposition–Research to production. Nucl. Instrum. Methods Phys. Res., Sect. B 37/38, 787 (1989)Google Scholar
19Leung, T.T. and Ong, C.W.: Control of crystallographic structure of aluminum nitride films prepared by magnetron sputtering. Integr. Ferroelectr. 57, 1201 (2003)CrossRefGoogle Scholar
20Leung, T.T. and Ong, C.W.: Nearly amorphous to epitaxial growth of aluminum nitride films. Diamond Relat. Mater. 13, 1603 (2004)Google Scholar