Hostname: page-component-586b7cd67f-dsjbd Total loading time: 0 Render date: 2024-11-26T20:20:43.515Z Has data issue: false hasContentIssue false

Spectroscopic analysis of tungsten oxide thin films

Published online by Cambridge University Press:  31 January 2011

Felicia S. Manciu*
Affiliation:
Department of Physics, University of Texas at El Paso, El Paso, Texas 79968
Jose L. Enriquez
Affiliation:
Department of Physics, University of Texas at El Paso, El Paso, Texas 79968
William G. Durrer
Affiliation:
Department of Physics, University of Texas at El Paso, El Paso, Texas 79968
Young Yun
Affiliation:
Department of Physics, University of Texas at El Paso, El Paso, Texas 79968
Chintalapalle V. Ramana
Affiliation:
Department of Mechanical Engineering, University of Texas at El Paso, Texas 79968
Satya K. Gullapalli
Affiliation:
Department of Mechanical Engineering, University of Texas at El Paso, Texas 79968
*
a)Address all correspondence to this author. e-mail: [email protected]
Get access

Abstract

We present a detailed study of the morphology and composition of tungsten oxide (WO3) thin films, grown by radio frequency magnetron reactive sputtering at substrate temperatures varied from room temperature (RT) to 500 °C, using infrared (IR) absorption, Raman spectroscopy, and x-ray photoelectron spectroscopy (XPS). This work includes valuable new far-IR results about structural changes in microcrystalline WO3. Both IR absorption and Raman techniques reveal an amorphous sample grown at RT and initial crystallization into monoclinic structures for samples grown at temperatures between 100 and 300 °C. The Raman spectra of the samples grown at high temperatures indicate, apart from the monoclinic structure, a strain effect, with a distribution revealed by confocal Raman mapping. XPS indicates that the film surface maintains the stoichiometry WOx, with a value of x slightly greater than 3 at RT due to oxygen contamination, which decreases with increasing temperature.

Type
Articles
Copyright
Copyright © Materials Research Society 2010

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Gavrilyuk, A.I., Zakharchenya, B.P., Chudnovskii, F.A.: Photochromism in WO3 thin films. Electrochim. Acta 44, 3027 (1999)CrossRefGoogle Scholar
2.Deb, S.K.: Optical and photoelectric properties and color centers in thin films of WO3. Philos. Mag. 17, 801 (1973)Google Scholar
3.Blackman, C.S., Parkin, I.P.: Atmospheric pressure chemical vapor deposition of crystalline monoclinic WO3 and WO3–x thin films from reaction of WCl6 with O-containing solvents and their photochromic and electrochromic properties. Chem. Mater. 17, 1583 (2005)Google Scholar
4.Lee, S.H., Deshpande, R., Parilla, P.A., Jones, K.M., To, B., Mahan, A.H., Dillon, A.C.: Crystalline WO3 nanoparticles for highly improved electrochromic applications. Adv. Mater. 18, 763 (2006)CrossRefGoogle Scholar
5.Baeck, S.H., Choi, K.S., Jaramillo, T.F., Stucky, G.D., McFarland, E.W.: Enhancement of photocatalytic and electrochromic properties of electrochemically fabricated mesoporous WO3 thin films. Adv. Mater. 15, 1269 (2003)CrossRefGoogle Scholar
6.Cheng, W., Baudrin, E., Dunn, B., Zink, J.I.: Synthesis and electrochromic properties of mesoporous tungsten oxide. J. Mater. Chem. 11, 92 (2001)CrossRefGoogle Scholar
7.Zhou, L., Ren, Q., Zhou, X., Tang, J., Chen, Z., Yu, C.: Comprehensive understanding on the formation of highly ordered mesoporous tungsten oxides by x-ray diffraction and Raman spectroscopy. Microporous Mesoporous Mater. 109, 248 (2008)Google Scholar
8.Durrani, S.M.A., Khawaja, E.E., Salim, M.A., Al-Kuhaili, M.F., Al-Shukri, A.M.: Effect of preparation conditions on the optical and thermochromic properties of thin films of tungsten oxide. Sol. Energy Mater. Sol. Cells 71, 313 (2002)Google Scholar
9.Lee, S.H., Cheong, H.M., Liu, P., Smith, D., Tracy, C.E., Mascarenhas, A., Pitts, J.R., Deb, S.K.: Raman spectroscopic studies of gasochromic a-WO3 thin films. Electrochim. Acta 46, 1995 (2001)CrossRefGoogle Scholar
10.Kanan, S.M., El-Kadri, O.M., Abu-Yousef, I.A., Kanan, M.C.: Semiconducting metal oxide based sensors for selective gas pollutant detection. Sensors 9, 8158 (2009)CrossRefGoogle ScholarPubMed
11.Williams, D.E.: Semiconducting oxides as gas-sensitive resistors. Sens. Actuators, B 57, 1 (1999)CrossRefGoogle Scholar
12.Kolmakov, A., Maskovits, M.: Chemical sensing and catalysis by one-dimensional metal-oxide nanostructures. Annu. Rev. Mater. Res. 34, 151 (2004)CrossRefGoogle Scholar
13.Tao, W.H., Tsai, C.H.: H2S sensing properties of noble metal doped WO3 thin film sensor fabricated by micromachining. Sens. Actuators, B 81, 237 (2002)CrossRefGoogle Scholar
14.Stankova, M., Vilanova, X., Calderer, J., Llobet, E., Brezmes, J., Gracia, I., Cane, C., Correig, X.: Sensitivity and selectivity improvement of RF sputtered WO3 microhotplate gas sensors. Sens. Actuators, B 113, 241 (2006)Google Scholar
15.Ramana, C.V., Utsunomiya, S., Ewing, R.C., Julien, C.M., Becker, U.: Structural stability and phase transitions in WO3 thin films. J. Phys. Chem. B 110, 10430 (2006)CrossRefGoogle ScholarPubMed
16.Salje, E.: The orthorhombic phase of WO3. Acta Crystallogr., Sect. B: Struct. Sci. 33, 574 (1977)CrossRefGoogle Scholar
17.Tanisaki, S.: Crystal structure of monoclinic tungsten trioxide at room temperature. J. Phys. Soc. Jpn. 15, 573 (1960)CrossRefGoogle Scholar
18.Woodward, P.M., Sleight, A.W., Vogt, T.: Ferroelectric tungsten trioxide. J. Solid State Chem. 131, 9 (1997)CrossRefGoogle Scholar
19.Boulova, M., Rosman, N., Bouvier, P., Lucazeau, G.: High-pressure Raman study of microcrystalline WO3 tungsten oxide. J. Phys. Condens. Matter 14, 5849 (2002)CrossRefGoogle Scholar
20.Souza Filho, A.G., Freire, P.T.C., Pilla, O., Ayala, A.P., Mendes Filho, J., Melo, F.E.A., Freire, V.N., Lemos, V.: Pressure effects in Raman spectrum of WO3 microcrystals. Phys. Rev. B: Condens. Matter 62, 3699 (2000)CrossRefGoogle Scholar
21.Salje, E.: Lattice dynamics of WO3. Acta Crystallogr., Sect. A: Found. Crystallogr. 31, 360 (1975)CrossRefGoogle Scholar
22.Gullapalli, S.K., Manciu, F.S., Enriquez, J.L., Ramana, C.V.: Tungsten oxide (WO3) thin films for application in advanced energy systems. J. Vac. Sci. Technol., A 28, 824 (2010)CrossRefGoogle Scholar
23.Ohwada, K.: Lattice vibrations of δ-uranium and tungsten trioxides. Spectrochim. Acta, Part A 26A, 1035 (1969)Google Scholar
24.Pecquenard, B., Lecacheux, H., Livage, J., Julien, C.: Orthorhombic WO3 formed via a T-stabilized WO3 H2O phase. J. Solid State Chem. 135, 159 (1998)CrossRefGoogle Scholar
25.Sun, H-T., Cantalini, C., Lozzi, L., Passacantando, M., Santucci, S., Pelino, M.: Microstructural effect on NO2 sensitivity of WO3 thin film gas sensors. Part 1. Thin film devices, sensors and actuators. Thin Solid Films 287, 258 (1996)CrossRefGoogle Scholar
26.Kim, Y.S.: Thermal treatment effects on the material and gas-sensing properties of room-temperature tungsten oxide nanorod sensors. Sens. Actuators, B 137, 297 (2009)Google Scholar
27.Wagner, C.D., Riggs, W.M., Davis, L.E., Moueler, J.E.: Handbook of X-ray Photoelectron Spectroscopy edited by G.E. Muilenberg (Perkin-Elmer, Eden Prairie, MN 1979)Google Scholar