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Solid-phase reactions in Ir/(111)Si systems studied by means of x-ray emission spectroscopy
Published online by Cambridge University Press: 31 January 2011
Extract
High energy resolved x-ray emission spectroscopy with variable electron beam excitation is applied for study of solid-phase reactions in the Ir/(111)Si system as a function of annealing temperature. The formation of Ir silicides as a function of depth is studied by measurements of Si L2,3 x-ray emission valence spectra at different electron excitation energies (3–10 keV), and the results are compared with those of Rutherford backscattering.
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- Copyright © Materials Research Society 1998
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