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Solid-phase epitaxy of ion-implanted LiNbO3 for optical waveguide fabrication

Published online by Cambridge University Press:  31 January 2011

Ch. Buchal ,
P. R. Ashley  and
B. R. Appleton
Ch. Buchal
Affiliation:
Oak Ridge National Laboratory, Solid State Division, Oak Ridge, Tennessee 37831
P. R. Ashley
Affiliation:
Oak Ridge National Laboratory, Solid State Division, Oak Ridge, Tennessee 37831
B. R. Appleton
Affiliation:
Oak Ridge National Laboratory, Solid State Division, Oak Ridge, Tennessee 37831
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Abstract

A new technique for successfully fabricating high-quality optical waveguides in LiNbO3 is reported. A high concentration of Ti is implanted with the substrate at liquid nitrogen temperature and an amorphous, Ti-rich, nonequilibrium phase is produced in the implanted, near-surface region. Subsequent thermal annealing in water-saturated oxygen atmosphere at up to 1000°C initiates solid-phase epitaxial regrowth onto the crystalline substrate. A highquality single crystalline layer results that is rich in Ti and has excellent waveguiding properties.

Type
Articles
Information
Journal of Materials Research , Volume 2 , Issue 2 , April 1987 , pp. 222 - 230
Copyright
Copyright © Materials Research Society 1987

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References

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