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Sol-gel Processing and Characterization of Alkaline Earth and Rare-earth Fluoride Thin Films

Published online by Cambridge University Press:  31 January 2011

Munehiro Tada ,
Shinobu Fujihara  and
Toshio Kimura
Munehiro Tada
Affiliation:
Department of Applied Chemistry, Faculty of Science and Technology, Keio University, 3–14–1, Hiyoshi, Kohoku-ku, Yokohama 223–8522, Japan
Shinobu Fujihara*
Affiliation:
Department of Applied Chemistry, Faculty of Science and Technology, Keio University, 3–14–1, Hiyoshi, Kohoku-ku, Yokohama 223–8522, Japan
Toshio Kimura
Affiliation:
Department of Applied Chemistry, Faculty of Science and Technology, Keio University, 3–14–1, Hiyoshi, Kohoku-ku, Yokohama 223–8522, Japan
*
a)Address all correspondence to this author.
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Abstract

Alkaline earth and rare-earth fluoride thin films were prepared on silica glass substrates by a sol-gel process using trifluoroacetic acid (TFA) as a fluorine source. Homogeneous solutions were obtained by stirring a mixture of alkaline earth or rare-earth metal acetates, TFA and H2O, dissolved in isopropanol. The solutions were spin-coated and heated at 300–800 °C. The fluoride thin films were obtained by heat treatment around 400 °C in air. The crystallization behavior, the surface morphology, and the optical properties of the films depended on the heating temperature as well as the chemical species of the metal ions.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 4 , April 1999 , pp. 1610 - 1616
Copyright
Copyright © Materials Research Society 1999

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