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Single-crystalline Tungsten Nanoparticles Produced by Thermal Decomposition of Tungsten Hexacarbonyl

Published online by Cambridge University Press:  31 January 2011

Martin H. Magnusson ,
Knut Deppert  and
Jan-Olle Malm
Martin H. Magnusson*
Affiliation:
Solid State Physics, Lund University, Box 118, S-221 00 Lund, Sweden
Knut Deppert
Affiliation:
Solid State Physics, Lund University, Box 118, S-221 00 Lund, Sweden
Jan-Olle Malm
Affiliation:
Inorganic Chemistry 2, Lund University, Box 124, S-221 00 Lund, Sweden
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Nanometer-sized particles of W are of interest in semiconductor device research, where such particles may store electrons inside heteroepitaxially defined structures. In this paper, we present results concerning W particles produced by thermal decomposition of tungsten hexacarbonyl. By the described method, it was possible to produce size-selected, single-crystalline W particles in the size range between 15 and 60 nm. The sintering behavior of the particles was studied between ambient temperatures and 1900 °C. The particle morphology and structure were examined with high-resolution transmission electron microscopy and electron diffraction techniques. Particles sintered at the highest temperatures typically were single crystals, with well-developed facets. Some problems concerning a yield reducing charging mechanism are discussed.

Type
Articles
Information
Journal of Materials Research , Volume 15 , Issue 7 , July 2000 , pp. 1564 - 1569
Copyright
Copyright © Materials Research Society 2000

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