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SEM and Auger studies of a PLZT thin film

Published online by Cambridge University Press:  31 January 2011

Kwangsoo No ,
Dae Sung Yoon  and
Jae Myung Kim
Kwangsoo No
Affiliation:
Department of Ceramic Science and Engineering, Korea Advanced Institute of Science and Technology, Taejon, Korea
Dae Sung Yoon
Affiliation:
Department of Ceramic Science and Engineering, Korea Advanced Institute of Science and Technology, Taejon, Korea
Jae Myung Kim
Affiliation:
Department of Ceramic Science and Engineering, Korea Advanced Institute of Science and Technology, Taejon, Korea
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Abstract

The microstructure and the composition profile of lead lanthanum zirconate titanate thin film fabricated using the sol-gel method were analyzed using the scanning electron microscope and scanning Auger microscope. The PLZT thin film consists of micron-scale spheroidal perovskite grains and nano-scale pyrochlore grains. The perovskite grain has a higher lead and lower oxygen and zirconium contents than the pyrochlore grain. The Auger spectra of the two phases were similar except for energy shift and extra fine structure of oxygen peaks. The Auger depth profile and SEM observation of the cross-sectional fracture surface showed higher perovskite content near the interface between PLZT and ITO films than the surface of the PLZT film.

Type
Communications
Information
Journal of Materials Research , Volume 8 , Issue 2 , February 1993 , pp. 245 - 248
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

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